Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors - Amendoeira Esteves, Rui; Wang, Chen; Kraft, Michael (Micromachines (Basel), 2021)
Keywords: Accelerometers; Computer simulation; Damping; Design; Design optimization; Domains; Eigenvalues; Electrodes; Finite element analysis; Finite element method; genetic algorithm; Genetic algorithms; Geometry; Inertial sensing devices; inertial sensors; Microelectromechanical systems; microelectromechanical systems (MEMS); Nanotechnology devices; Optimization; Partial differential equations; Programming languages; Python; Sensors; Simulation; Software; Software development tools; genetic algorithm; finite element method; microelectromechanical systems (MEMS); optimization; accelerometer; inertial sensors; Python; gyroscope