Micro Orthogonal Fluxgate Sensor Fabricated with Amorphous CoZrNb Film
We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts: the conductor for excitation current flow, the magnetic layer sensitive to an external magnetic field, and the detection coil for measuring...
Saved in:
| Published in | Sensors (Basel, Switzerland) Vol. 25; no. 16; p. 5022 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Switzerland
MDPI AG
13.08.2025
MDPI |
| Subjects | |
| Online Access | Get full text |
| ISSN | 1424-8220 1424-8220 |
| DOI | 10.3390/s25165022 |
Cover
| Abstract | We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts: the conductor for excitation current flow, the magnetic layer sensitive to an external magnetic field, and the detection coil for measuring output voltage dependent on an external magnetic field. The magnetic layer forms a magnetically closed-circuit in the cross-section, which reduces reluctance and power consumption. Key fabrication challenges, such as poor step coverage and delamination, were effectively addressed by adjusting the sputtering angle, rotating the substrate during deposition, incorporating a Ta adhesion layer, and applying O2 plasma surface treatment. Optimal sensor performance was achieved by vacuum annealing the CoZrNb films at 300 °C under an applied magnetic field of 500 Oe. This process effectively enhanced magnetic softness and induced magnetic anisotropy, resulting in both very low coercivity (0.1 Oe) and a stable amorphous structure. The effects of operation frequency and the conductor width on the output characteristics of the fabricated sensors were quantitatively investigated. The sensor exhibited a maximum sensitivity of 0.98 mV/Oe (=9.8 V/T). Our results demonstrate that miniaturized orthogonal fluxgate sensors suitable for multi-chip packaging can be applied to measure the Earth’s magnetic field. |
|---|---|
| AbstractList | We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts: the conductor for excitation current flow, the magnetic layer sensitive to an external magnetic field, and the detection coil for measuring output voltage dependent on an external magnetic field. The magnetic layer forms a magnetically closed-circuit in the cross-section, which reduces reluctance and power consumption. Key fabrication challenges, such as poor step coverage and delamination, were effectively addressed by adjusting the sputtering angle, rotating the substrate during deposition, incorporating a Ta adhesion layer, and applying O[sub.2] plasma surface treatment. Optimal sensor performance was achieved by vacuum annealing the CoZrNb films at 300 °C under an applied magnetic field of 500 Oe. This process effectively enhanced magnetic softness and induced magnetic anisotropy, resulting in both very low coercivity (0.1 Oe) and a stable amorphous structure. The effects of operation frequency and the conductor width on the output characteristics of the fabricated sensors were quantitatively investigated. The sensor exhibited a maximum sensitivity of 0.98 mV/Oe (=9.8 V/T). Our results demonstrate that miniaturized orthogonal fluxgate sensors suitable for multi-chip packaging can be applied to measure the Earth’s magnetic field. We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts: the conductor for excitation current flow, the magnetic layer sensitive to an external magnetic field, and the detection coil for measuring output voltage dependent on an external magnetic field. The magnetic layer forms a magnetically closed-circuit in the cross-section, which reduces reluctance and power consumption. Key fabrication challenges, such as poor step coverage and delamination, were effectively addressed by adjusting the sputtering angle, rotating the substrate during deposition, incorporating a Ta adhesion layer, and applying O plasma surface treatment. Optimal sensor performance was achieved by vacuum annealing the CoZrNb films at 300 °C under an applied magnetic field of 500 Oe. This process effectively enhanced magnetic softness and induced magnetic anisotropy, resulting in both very low coercivity (0.1 Oe) and a stable amorphous structure. The effects of operation frequency and the conductor width on the output characteristics of the fabricated sensors were quantitatively investigated. The sensor exhibited a maximum sensitivity of 0.98 mV/Oe (=9.8 V/T). Our results demonstrate that miniaturized orthogonal fluxgate sensors suitable for multi-chip packaging can be applied to measure the Earth's magnetic field. We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts: the conductor for excitation current flow, the magnetic layer sensitive to an external magnetic field, and the detection coil for measuring output voltage dependent on an external magnetic field. The magnetic layer forms a magnetically closed-circuit in the cross-section, which reduces reluctance and power consumption. Key fabrication challenges, such as poor step coverage and delamination, were effectively addressed by adjusting the sputtering angle, rotating the substrate during deposition, incorporating a Ta adhesion layer, and applying O2 plasma surface treatment. Optimal sensor performance was achieved by vacuum annealing the CoZrNb films at 300 °C under an applied magnetic field of 500 Oe. This process effectively enhanced magnetic softness and induced magnetic anisotropy, resulting in both very low coercivity (0.1 Oe) and a stable amorphous structure. The effects of operation frequency and the conductor width on the output characteristics of the fabricated sensors were quantitatively investigated. The sensor exhibited a maximum sensitivity of 0.98 mV/Oe (=9.8 V/T). Our results demonstrate that miniaturized orthogonal fluxgate sensors suitable for multi-chip packaging can be applied to measure the Earth's magnetic field.We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts: the conductor for excitation current flow, the magnetic layer sensitive to an external magnetic field, and the detection coil for measuring output voltage dependent on an external magnetic field. The magnetic layer forms a magnetically closed-circuit in the cross-section, which reduces reluctance and power consumption. Key fabrication challenges, such as poor step coverage and delamination, were effectively addressed by adjusting the sputtering angle, rotating the substrate during deposition, incorporating a Ta adhesion layer, and applying O2 plasma surface treatment. Optimal sensor performance was achieved by vacuum annealing the CoZrNb films at 300 °C under an applied magnetic field of 500 Oe. This process effectively enhanced magnetic softness and induced magnetic anisotropy, resulting in both very low coercivity (0.1 Oe) and a stable amorphous structure. The effects of operation frequency and the conductor width on the output characteristics of the fabricated sensors were quantitatively investigated. The sensor exhibited a maximum sensitivity of 0.98 mV/Oe (=9.8 V/T). Our results demonstrate that miniaturized orthogonal fluxgate sensors suitable for multi-chip packaging can be applied to measure the Earth's magnetic field. We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts: the conductor for excitation current flow, the magnetic layer sensitive to an external magnetic field, and the detection coil for measuring output voltage dependent on an external magnetic field. The magnetic layer forms a magnetically closed-circuit in the cross-section, which reduces reluctance and power consumption. Key fabrication challenges, such as poor step coverage and delamination, were effectively addressed by adjusting the sputtering angle, rotating the substrate during deposition, incorporating a Ta adhesion layer, and applying O2 plasma surface treatment. Optimal sensor performance was achieved by vacuum annealing the CoZrNb films at 300 °C under an applied magnetic field of 500 Oe. This process effectively enhanced magnetic softness and induced magnetic anisotropy, resulting in both very low coercivity (0.1 Oe) and a stable amorphous structure. The effects of operation frequency and the conductor width on the output characteristics of the fabricated sensors were quantitatively investigated. The sensor exhibited a maximum sensitivity of 0.98 mV/Oe (=9.8 V/T). Our results demonstrate that miniaturized orthogonal fluxgate sensors suitable for multi-chip packaging can be applied to measure the Earth’s magnetic field. |
| Audience | Academic |
| Author | Hong, Sung-Min Kim, Kyung-Won Lim, Sang Ho Lee, Daesung Shin, Kwang-Ho |
| AuthorAffiliation | 2 Smart Sensor Research Center, Korea Electronics Technology Institute, Seongnam 13509, Republic of Korea; smhong@keti.re.kr (S.-M.H.); leeds@keti.re.kr (D.L.) 1 Department of Material Science and Engineering, Korea University, Seoul 02841, Republic of Korea; kkw8952@keti.re.kr 3 Department of Information and Communication Engineering, Kyungsung University, Busan 48434, Republic of Korea |
| AuthorAffiliation_xml | – name: 1 Department of Material Science and Engineering, Korea University, Seoul 02841, Republic of Korea; kkw8952@keti.re.kr – name: 2 Smart Sensor Research Center, Korea Electronics Technology Institute, Seongnam 13509, Republic of Korea; smhong@keti.re.kr (S.-M.H.); leeds@keti.re.kr (D.L.) – name: 3 Department of Information and Communication Engineering, Kyungsung University, Busan 48434, Republic of Korea |
| Author_xml | – sequence: 1 givenname: Kyung-Won surname: Kim fullname: Kim, Kyung-Won – sequence: 2 givenname: Sung-Min surname: Hong fullname: Hong, Sung-Min – sequence: 3 givenname: Daesung surname: Lee fullname: Lee, Daesung – sequence: 4 givenname: Kwang-Ho orcidid: 0000-0001-9147-9894 surname: Shin fullname: Shin, Kwang-Ho – sequence: 5 givenname: Sang Ho surname: Lim fullname: Lim, Sang Ho |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/40871884$$D View this record in MEDLINE/PubMed |
| BookMark | eNp9kktv3CAUhVGVqnm0i_6BylI3TaRJeRnDqhqN4iZS0izabrpBGLCHETYTsJvm35fE6SjJomIBOnw63Hu4h2BvCIMF4D2Cp4QI-DnhErESYvwKHCCK6YJjDPeenPfBYUobCDEhhL8B-xTyCnFOD0B95XQMxXUc16ELg_JF7ac_nRpt8d0OKcSiVk10OgumuHXjulj2IW7XYUrFKvyK35qidr5_C163yif77nE_Aj_rsx-r88Xl9deL1fJyoWmFxkVJREsYVUbDFjWmgrDikFJSaVJizi22QhksTMNQVWnKMTSIQktMi2xTCkiOwMXsa4LayG10vYp3MignH4QQO6ni6LS3smWkRBghyJigmiiOG0OpoKXFGAnBstfJ7DUNW3V3q7zfGSIo74OVu2Az_GWGt1PTW6PtMEbln1Xw_GZwa9mF3xJhwgVnNDt8enSI4WayaZS9S9p6rwab05QEU0YgFRXJ6McX6CZMMX_OA0UhQyWqMnU6U53K7bqhDflhnZexvdN5QlqX9SUvSc6RwHvbD0972BX_bxoycDwDeSRSirb9TyB_AZVfv7w |
| Cites_doi | 10.1145/3139222 10.1007/s00542-014-2326-1 10.20944/preprints202306.1500.v1 10.20944/preprints202302.0121.v1 10.1088/0960-1317/2/3/003 10.1016/j.sna.2006.03.032 10.1016/S0921-5093(96)10694-8 10.1016/j.jmmm.2007.03.196 10.1155/2019/2413408 10.1016/j.actamat.2012.10.040 10.3390/mi7010014 10.4283/JMAG.2013.18.2.159 10.3379/tmjpn2001.2.384 10.2478/v10048-012-0039-0 10.3390/s150614727 10.1063/9.0000231 10.3390/s19143116 10.1007/978-1-4020-8021-0 10.1016/j.apsusc.2021.149660 10.1016/j.sna.2024.115315 10.1016/j.jmmm.2023.171646 10.1016/j.measurement.2011.10.013 10.1016/S0924-4247(98)00107-1 10.1109/LED.2022.3187447 10.1016/j.mtla.2020.100774 10.1016/j.sna.2018.05.027 10.1109/TMAG.2002.802286 10.1063/1.348158 10.3390/magnetism2030021 10.1016/j.sna.2017.09.045 10.1016/0924-4247(92)80159-Z 10.1007/978-3-319-34070-8 10.1088/1742-6596/365/1/012003 10.1088/0031-8949/1988/T24/006 10.3390/mi8120352 10.1007/BF02652956 10.1016/j.sna.2006.10.005 10.1109/JSEN.2018.2797961 10.1016/j.jmmm.2021.168410 10.1016/j.jmmm.2023.171362 10.1109/TMAG.2005.847634 10.3390/s141222864 10.1116/1.580082 10.1016/S0924-4247(97)80024-6 10.1016/0304-8853(92)91541-Z 10.1038/micronano.2015.5 10.1016/j.elspec.2004.02.060 |
| ContentType | Journal Article |
| Copyright | COPYRIGHT 2025 MDPI AG 2025 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. 2025 by the authors. 2025 |
| Copyright_xml | – notice: COPYRIGHT 2025 MDPI AG – notice: 2025 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. – notice: 2025 by the authors. 2025 |
| DBID | AAYXX CITATION NPM 3V. 7X7 7XB 88E 8FI 8FJ 8FK ABUWG AFKRA AZQEC BENPR CCPQU DWQXO FYUFA GHDGH K9. M0S M1P PHGZM PHGZT PIMPY PJZUB PKEHL PPXIY PQEST PQQKQ PQUKI 7X8 5PM ADTOC UNPAY DOA |
| DOI | 10.3390/s25165022 |
| DatabaseName | CrossRef PubMed ProQuest Central (Corporate) Health & Medical Collection ProQuest Central (purchase pre-March 2016) Medical Database (Alumni Edition) Hospital Premium Collection Hospital Premium Collection (Alumni Edition) ProQuest Central (Alumni) (purchase pre-March 2016) ProQuest Central (Alumni) ProQuest Central UK/Ireland ProQuest Central Essentials - QC ProQuest Central ProQuest One Community College ProQuest Central Korea Health Research Premium Collection Health Research Premium Collection (Alumni) ProQuest Health & Medical Complete (Alumni) Health & Medical Collection (Alumni Edition) Medical Database Proquest Central Premium ProQuest One Academic Publicly Available Content Database ProQuest Health & Medical Research Collection ProQuest One Academic Middle East (New) ProQuest One Health & Nursing ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Academic ProQuest One Academic UKI Edition MEDLINE - Academic PubMed Central (Full Participant titles) Unpaywall for CDI: Periodical Content Unpaywall Directory of Open Access Journals |
| DatabaseTitle | CrossRef PubMed Publicly Available Content Database ProQuest One Academic Middle East (New) ProQuest Central Essentials ProQuest Health & Medical Complete (Alumni) ProQuest Central (Alumni Edition) ProQuest One Community College ProQuest One Health & Nursing ProQuest Central ProQuest Health & Medical Research Collection Health Research Premium Collection Health and Medicine Complete (Alumni Edition) ProQuest Central Korea Health & Medical Research Collection ProQuest Central (New) ProQuest Medical Library (Alumni) ProQuest One Academic Eastern Edition ProQuest Hospital Collection Health Research Premium Collection (Alumni) ProQuest Hospital Collection (Alumni) ProQuest Health & Medical Complete ProQuest Medical Library ProQuest One Academic UKI Edition ProQuest One Academic ProQuest One Academic (New) ProQuest Central (Alumni) MEDLINE - Academic |
| DatabaseTitleList | PubMed MEDLINE - Academic Publicly Available Content Database CrossRef |
| Database_xml | – sequence: 1 dbid: DOA name: DOAJ Directory of Open Access Journals url: https://www.doaj.org/ sourceTypes: Open Website – sequence: 2 dbid: NPM name: PubMed url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed sourceTypes: Index Database – sequence: 3 dbid: UNPAY name: Unpaywall url: https://proxy.k.utb.cz/login?url=https://unpaywall.org/ sourceTypes: Open Access Repository – sequence: 4 dbid: BENPR name: ProQuest Central url: http://www.proquest.com/pqcentral?accountid=15518 sourceTypes: Aggregation Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1424-8220 |
| ExternalDocumentID | oai_doaj_org_article_f635121106694c3a82bd44945e221996 10.3390/s25165022 PMC12389864 A853820303 40871884 10_3390_s25165022 |
| Genre | Journal Article |
| GeographicLocations | Washington, D.C Missouri |
| GeographicLocations_xml | – name: Washington, D.C – name: Missouri |
| GrantInformation_xml | – fundername: The Ministry of Trade, Industry and Energy Republic of Korea grantid: RS-2022-00154902, RS-2023-00236809 – fundername: Ministry of Trade, Industry, and Energy, Republic of Korea grantid: RS-2022-00154902; RS-2023-00236809 |
| GroupedDBID | --- 123 2WC 53G 5VS 7X7 88E 8FE 8FG 8FI 8FJ AADQD AAHBH AAYXX ABDBF ABUWG ACUHS ADBBV ADMLS AENEX AFKRA AFZYC ALMA_UNASSIGNED_HOLDINGS BENPR BPHCQ BVXVI CCPQU CITATION CS3 D1I DU5 E3Z EBD ESX F5P FYUFA GROUPED_DOAJ GX1 HH5 HMCUK HYE IAO ITC KQ8 L6V M1P M48 MODMG M~E OK1 OVT P2P P62 PHGZM PHGZT PIMPY PJZUB PPXIY PQQKQ PROAC PSQYO RNS RPM TUS UKHRP XSB ~8M NPM PUEGO 3V. 7XB 8FK AZQEC DWQXO K9. PKEHL PQEST PQUKI 7X8 5PM ADRAZ ADTOC IPNFZ RIG UNPAY |
| ID | FETCH-LOGICAL-c471t-539f364adc0f1bd7007804437c35288e2e9ad29db6177c4820d140e3df1eb5903 |
| IEDL.DBID | M48 |
| ISSN | 1424-8220 |
| IngestDate | Fri Oct 03 12:42:55 EDT 2025 Sun Oct 26 03:46:20 EDT 2025 Tue Sep 30 17:01:15 EDT 2025 Thu Oct 02 21:34:56 EDT 2025 Tue Oct 07 07:33:03 EDT 2025 Mon Oct 20 16:51:09 EDT 2025 Thu Sep 04 05:07:29 EDT 2025 Thu Oct 16 04:44:25 EDT 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 16 |
| Keywords | micro-fabrication orthogonal fluxgate sensitivity amorphous CoZrNb film |
| Language | English |
| License | Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). cc-by |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c471t-539f364adc0f1bd7007804437c35288e2e9ad29db6177c4820d140e3df1eb5903 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23 |
| ORCID | 0000-0001-9147-9894 |
| OpenAccessLink | http://journals.scholarsportal.info/openUrl.xqy?doi=10.3390/s25165022 |
| PMID | 40871884 |
| PQID | 3244061517 |
| PQPubID | 2032333 |
| ParticipantIDs | doaj_primary_oai_doaj_org_article_f635121106694c3a82bd44945e221996 unpaywall_primary_10_3390_s25165022 pubmedcentral_primary_oai_pubmedcentral_nih_gov_12389864 proquest_miscellaneous_3246304973 proquest_journals_3244061517 gale_infotracacademiconefile_A853820303 pubmed_primary_40871884 crossref_primary_10_3390_s25165022 |
| PublicationCentury | 2000 |
| PublicationDate | 2025-08-13 |
| PublicationDateYYYYMMDD | 2025-08-13 |
| PublicationDate_xml | – month: 08 year: 2025 text: 2025-08-13 day: 13 |
| PublicationDecade | 2020 |
| PublicationPlace | Switzerland |
| PublicationPlace_xml | – name: Switzerland – name: Basel |
| PublicationTitle | Sensors (Basel, Switzerland) |
| PublicationTitleAlternate | Sensors (Basel) |
| PublicationYear | 2025 |
| Publisher | MDPI AG MDPI |
| Publisher_xml | – name: MDPI AG – name: MDPI |
| References | Cui (ref_9) 2023; 35 Sasada (ref_50) 2002; 38 Bertotti (ref_40) 1997; A226–228 Dressler (ref_15) 2021; 11 Linder (ref_25) 1992; 2 Wang (ref_5) 2022; 43 ref_14 Takahashi (ref_38) 1991; 69 ref_11 Learn (ref_34) 1974; 3 ref_53 Renaudin (ref_1) 2014; 14 Murata (ref_20) 2018; 18 Fischer (ref_12) 2015; 1 ref_17 Li (ref_29) 2007; 315 Naili (ref_31) 1992; 104–107 Jiang (ref_42) 2003; B103 Heimfartha (ref_18) 2018; 279 Kim (ref_19) 2013; 18 Dirks (ref_33) 1990; 193–194 Zier (ref_47) 2004; 137–140 He (ref_2) 2017; 50 He (ref_55) 2019; 2019 (ref_27) 2021; 559 Zhi (ref_21) 2017; 267 ref_24 Diguet (ref_54) 2022; 2 Viala (ref_37) 2002; 2 Fujiwara (ref_44) 2021; 540 ref_26 Lei (ref_10) 2012; 45 Poddar (ref_28) 2023; 587 Chen (ref_35) 2005; 41 Butler (ref_13) 1998; 70 Swan (ref_45) 1995; 140–144 Ma (ref_6) 2024; 371 ref_36 Priftis (ref_16) 2024; 590 Kawahito (ref_4) 1996; 54 Schott (ref_56) 2006; 132 Ripka (ref_51) 1992; 33 Lu (ref_52) 2015; 15 Kreiml (ref_32) 2020; 12 Barrera (ref_30) 2012; 365 Lei (ref_7) 2012; 12 Guo (ref_22) 2014; 21 Zorlu (ref_23) 2007; 135 ref_46 Takahashi (ref_43) 1991; 1991 Herzer (ref_41) 2013; 61 Han (ref_49) 1996; 14 ref_3 ref_48 ref_8 Konczos (ref_39) 1988; T24 |
| References_xml | – volume: 50 start-page: 1 year: 2017 ident: ref_2 article-title: Geomagnetism for Smartphone-Based Indoor Localization: Challenges, Advances, and Comparisons publication-title: ACM Comput. Surv. doi: 10.1145/3139222 – volume: 21 start-page: 1579 year: 2014 ident: ref_22 article-title: Orthogonal micro-fluxgate with S-shape Excitation wire and 3D Solenoid Detection coil publication-title: Microsyst. Technol. doi: 10.1007/s00542-014-2326-1 – volume: 1991 start-page: 48 year: 1991 ident: ref_43 article-title: Annealing Dependences of Coercivity, Anisotropy Magnetic Field and Resistivity for Amosrphous CoZrNb Films De-posited by DC Planar Magnetron Sputtering publication-title: Bull. Fac. Eng. Toyama Univ. – ident: ref_48 doi: 10.20944/preprints202306.1500.v1 – ident: ref_3 doi: 10.20944/preprints202302.0121.v1 – volume: 2 start-page: 122 year: 1992 ident: ref_25 article-title: Surface Micromachining publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/2/3/003 – volume: 132 start-page: 165 year: 2006 ident: ref_56 article-title: Novel Analog Magnetic Angle Sensor with Linear Output publication-title: Sens. Actuators A doi: 10.1016/j.sna.2006.03.032 – volume: A226–228 start-page: 603 year: 1997 ident: ref_40 article-title: Magnetic properties of Rapidly Quenched Soft Magnetic Materials publication-title: Mater. Sci. Eng. doi: 10.1016/S0921-5093(96)10694-8 – volume: 315 start-page: 120 year: 2007 ident: ref_29 article-title: Thickness-dependent magnetization reversal in CoZrNb amorphous films publication-title: J. Magn. Magn. Mater. doi: 10.1016/j.jmmm.2007.03.196 – volume: 2019 start-page: 2413408 year: 2019 ident: ref_55 article-title: A Feedback Method to Improve the Dynamic Range and the Linearity of Magnetoimpedance Magnetic Sensor publication-title: J. Sens. doi: 10.1155/2019/2413408 – volume: 61 start-page: 718 year: 2013 ident: ref_41 article-title: Modern soft magnets: Amorphous and nanocrystalline materials publication-title: Acta Mater. doi: 10.1016/j.actamat.2012.10.040 – volume: 193–194 start-page: 999 year: 1990 ident: ref_33 article-title: Electromigration Phenomena in Al-Si and Al-V-Si Thin Alloy Films publication-title: Thin Solid Film. – ident: ref_14 doi: 10.3390/mi7010014 – volume: 18 start-page: 159 year: 2013 ident: ref_19 article-title: Optimization of Operation Frequency of Orthogonal Fluxgate Sensor Fabricated with Co Based Amorphous Wire publication-title: J. Magn. doi: 10.4283/JMAG.2013.18.2.159 – volume: 2 start-page: 384 year: 2002 ident: ref_37 article-title: High Frequency Magnetic Properties of CoZrNb thin films Deposited by Dynamic Sputtering Technique for GHz Si-integrated Planar Inductors publication-title: Trans. Magn. Soc. Jpn. doi: 10.3379/tmjpn2001.2.384 – volume: 12 start-page: 286 year: 2012 ident: ref_7 article-title: Micro Fluxgate Sensor using Solenoid Coils Fabricated by MEMS Technology publication-title: Meas. Sci. Rev. doi: 10.2478/v10048-012-0039-0 – volume: 35 start-page: 989 year: 2023 ident: ref_9 article-title: Optimum Excitation Current of Fluxgate Based on Striped Ar-ray Iron Core publication-title: Sens. Mater. – volume: 15 start-page: 14727 year: 2015 ident: ref_52 article-title: A 3-Axis Miniature Magnetic Sensor Based on a Planar Fluxgate Magnetometer with an Orthogonal Fluxguide publication-title: Sensors doi: 10.3390/s150614727 – volume: 11 start-page: 015347 year: 2021 ident: ref_15 article-title: Reduction of Magnetic Noise Limits of Orthogonal Fluxgate Sensor publication-title: AIP Adv. doi: 10.1063/9.0000231 – ident: ref_24 doi: 10.3390/s19143116 – ident: ref_26 doi: 10.1007/978-1-4020-8021-0 – volume: 559 start-page: 149660 year: 2021 ident: ref_27 article-title: Substrate Rotation Effect Over Scaling Roughness Exponents in Zr Thin films grown by GLAD Technique publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2021.149660 – volume: 371 start-page: 115315 year: 2024 ident: ref_6 article-title: A Multidimensional integrated Micro Three-component Fluxgate Sensor based on Microelectromechanical System Technology publication-title: Sens. Actuators A Phys. doi: 10.1016/j.sna.2024.115315 – volume: 590 start-page: 171646 year: 2024 ident: ref_16 article-title: Development of a High-Sensitivity Orthogonal Fluxgate Sensor publication-title: J. Magn. Magn. Mater. doi: 10.1016/j.jmmm.2023.171646 – volume: 45 start-page: 535 year: 2012 ident: ref_10 article-title: Fabrication and Characterization of a new MEMS Fluxgate Sensor with Nanocrystalline Magnetic core publication-title: Measurement doi: 10.1016/j.measurement.2011.10.013 – volume: 70 start-page: 15 year: 1998 ident: ref_13 article-title: Multichip module packaging of microelectromechanical systems publication-title: Sens. Actuators A doi: 10.1016/S0924-4247(98)00107-1 – volume: 43 start-page: 1327 year: 2022 ident: ref_5 article-title: Highly-Sensitive MEMS Micro-fluxgate Magnetometer publication-title: IEEE Electron Device Lett. doi: 10.1109/LED.2022.3187447 – volume: 12 start-page: 100774 year: 2020 ident: ref_32 article-title: Balancing the electro-mechanical and interfacial performance of Mo-based alloy films publication-title: Materialia doi: 10.1016/j.mtla.2020.100774 – volume: 279 start-page: 113 year: 2018 ident: ref_18 article-title: Miniature Orthogonal Fluxgate Sensor in Rotation Magnetization Mode: Modeling and Characterization publication-title: Sens. Actuators A Phys. doi: 10.1016/j.sna.2018.05.027 – volume: 38 start-page: 3377 year: 2002 ident: ref_50 article-title: Symmetric Response Obtained with an Orthogonal Fluxgate Operating in Fundamental mode publication-title: IEEE Trans. Magn. doi: 10.1109/TMAG.2002.802286 – ident: ref_53 – volume: 69 start-page: 5011 year: 1991 ident: ref_38 article-title: Annealing Dependence of Coercivity, Anisotropy field, and Resistivity for amorphous CoZrNb films Deposited by DC Planar Magnetron Sputtering publication-title: J. Appl. Phys. doi: 10.1063/1.348158 – volume: 2 start-page: 288 year: 2022 ident: ref_54 article-title: Magneto Elasticity Modeling for Stress Sensors publication-title: Magnetism doi: 10.3390/magnetism2030021 – volume: 267 start-page: 121 year: 2017 ident: ref_21 article-title: Investigation of a Novel MEMS Orthogonal Fluxgate Sensor Fabricated with Co-based Amorphous Ribbon core publication-title: Sens. Actuators A doi: 10.1016/j.sna.2017.09.045 – volume: 33 start-page: 129 year: 1992 ident: ref_51 article-title: Review of fluxgate sensors publication-title: Sens. Actuators A doi: 10.1016/0924-4247(92)80159-Z – ident: ref_17 doi: 10.1007/978-3-319-34070-8 – volume: 365 start-page: 012003 year: 2012 ident: ref_30 article-title: Soft Magnetic thin films: Influence of annealing on magnetic properties publication-title: J. Phys. Conf. Ser. doi: 10.1088/1742-6596/365/1/012003 – ident: ref_11 – volume: T24 start-page: 42 year: 1988 ident: ref_39 article-title: Recent Progress in the Application of Soft Magnetic Amorphous Materials: AIIoys, Preparation. Devices publication-title: Phys. Scr. doi: 10.1088/0031-8949/1988/T24/006 – ident: ref_8 doi: 10.3390/mi8120352 – volume: 3 start-page: 531 year: 1974 ident: ref_34 article-title: Electromigration Effects in Aluminum Alloy Metallization publication-title: J. Electron. Mater. doi: 10.1007/BF02652956 – volume: B103 start-page: 32 year: 2003 ident: ref_42 article-title: The Structure and Soft Magnetic Properties of Rapid Recurrent Thermal Annealing CoNbZr Nanocrystalline Alloys Thin films publication-title: Mater. Eng. – volume: 135 start-page: 43 year: 2007 ident: ref_23 article-title: An Orthogonal Fluxgate-type Magnetic Microsensor with Electroplated Permalloy core publication-title: Sens. Actuators A doi: 10.1016/j.sna.2006.10.005 – volume: 18 start-page: 2705 year: 2018 ident: ref_20 article-title: Fundamental Mode Orthogonal Fluxgate Magnetometer Applicable for Measurements of DC and Low-Frequency Magnetic Fields publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2018.2797961 – volume: 540 start-page: 168410 year: 2021 ident: ref_44 article-title: Effect of Annealing Temperature on Coercivity of Amorphous FeSiBNb films publication-title: J. Magn. Magn. Mater. doi: 10.1016/j.jmmm.2021.168410 – volume: 587 start-page: 171362 year: 2023 ident: ref_28 article-title: Growth rate and Substrate Temperature Dependent Magnetic and Magneto-microstructural Properties of Sputtered Fe-Co-Al thin films publication-title: J. Magn. Magn. Mater. doi: 10.1016/j.jmmm.2023.171362 – ident: ref_46 – volume: 41 start-page: 2077 year: 2005 ident: ref_35 article-title: Demagnetizing Factors for Rectangular Prisms publication-title: IEEE Trans. Magn. doi: 10.1109/TMAG.2005.847634 – volume: 14 start-page: 22864 year: 2014 ident: ref_1 article-title: Magnetic, Acceleration Fields and Gyro-scope Quaternion (MAGYQ)-Based Attitude Estimation with Smartphone Sensors for In-door Pedestrian Navigation publication-title: Sensors doi: 10.3390/s141222864 – volume: 14 start-page: 2062 year: 1996 ident: ref_49 article-title: Study of Surface Reactions during Plasma Enhanced Chemical Vapor Deposition of SiO2 from Si4O2, and Ar Plasma publication-title: J. Vac. Sci. Technol. A doi: 10.1116/1.580082 – volume: 54 start-page: 612 year: 1996 ident: ref_4 article-title: High-Resolution Micro-fluxgate Sensing Elements using Closely Coupled Coil Structures publication-title: Sens. Actuators A doi: 10.1016/S0924-4247(97)80024-6 – volume: 104–107 start-page: 1769 year: 1992 ident: ref_31 article-title: The origin of the induced magnetic anisotropy in amorphous Co-M (M = Zr, Nb, Ti, Pt) thin films publication-title: J. Magn. Magn. Mater. doi: 10.1016/0304-8853(92)91541-Z – ident: ref_36 – volume: 140–144 start-page: 691 year: 1995 ident: ref_45 article-title: Coercive field of Amorphous Soft Ferromagnetic Films: Dependence upon Thickness publication-title: J. Magn. Magn. Mater. – volume: 1 start-page: 15005 year: 2015 ident: ref_12 article-title: Integrating MEMS and ICs publication-title: Microsyst. Nanoeng. doi: 10.1038/micronano.2015.5 – volume: 137–140 start-page: 229 year: 2004 ident: ref_47 article-title: Interface Formation and Reactions at Ta-Si and Ta-SiO2 Interfaces Studied by XPS and ARXPS publication-title: J. Electron Spectrosc. Relat. Phenom. doi: 10.1016/j.elspec.2004.02.060 |
| SSID | ssj0023338 |
| Score | 2.4584231 |
| Snippet | We successfully fabricated micro orthogonal fluxgate sensors using amorphous CoZrNb films. The sensor, measuring 1.5 mm × 0.5 mm, consists of three main parts:... |
| SourceID | doaj unpaywall pubmedcentral proquest gale pubmed crossref |
| SourceType | Open Website Open Access Repository Aggregation Database Index Database |
| StartPage | 5022 |
| SubjectTerms | amorphous CoZrNb film Anisotropy Annealing Laminated materials Magnetic fields Magnetic properties micro-fabrication orthogonal fluxgate Plating sensitivity Sensors Smartphones |
| SummonAdditionalLinks | – databaseName: Directory of Open Access Journals dbid: DOA link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1Nb5wwEB1VuaQ9REk_EvJRuWmlnlDANmCOm1VQVKnbQxop6sWysUkibSDaD7X595kBFu22qnrpFYxlZrDfezA8A3xKfZ4ZmRny065CKYwPjY1RqlROcWlLYaq2yneSXl7LLzfJzdpWX1QT1tkDd4E7qxARyYYMoTGXeKni1kmZy8RzThW0tPpGKl-JqV5qCVRenY-QQFF_NkcURyrC-Qb6tCb9fy7Fa1j0e53k9rJ-NE8_zXS6BkLFLuz07JGNulHvwQtfv4ZXa56Cb6D4SiV27NtscdfcEs1mxXT5i16WsSuUrM2MFca2ewN5x-gtLBs9NBjsZjln4-bHbGJZcT99eAvXxcX38WXYb5YQlogvizAReSVSaVwZVbF1GWF_JKXISvJvUZ773DieO4uUJSslAr9DbeWFq2JvkzwS72Crbmp_AKyMfYydRL5UKJwjjhIqjQ02jzPnEhEFcLoKon7sPDE0agmKtB4iHcA5hXdoQDbW7QFMru6Tq_-V3AA-U3I0TTbMQGn6fwZwnGRbpUdINvBOEIYDOF7lT_ezcK6RLMqWsmUBfBhO4_yhjyKm9hhZapPSp8YMu9jv0j2MWUYoJ5WSAaiNB2HjpjbP1Pd3rUc3EgJFzvcBfByemb8H6_B_BOsIXnLanJj8esUxbC1mS3-CjGlh37eT4xnOFA7d priority: 102 providerName: Directory of Open Access Journals – databaseName: ProQuest Central dbid: BENPR link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1Lb9QwEB6V7QE4VOWdUpB5SJyiJrbzOlTVtmpUIbEgoFLFxXJsp620TZbsroB_35lsEnZBcE2syBmPPd9nj78BeBu7LNEy0aSnXfpSaOfrIkSqUtqUy8IIXbZZvpP47Fy-v4gutmDS34WhtMp-TWwXalsb2iM_wMAv2_CbHM2--1Q1ik5X-xIauiutYA9bibE7sM1JGWsE28enk0-fBwomkJGt9IUEkv2DOUZ3hCicb0SlVrz_7yV6LUb9mT95d1nN9K8fejpdC075Lux0qJKNV27wALZc9RDur2kNPoL8A6XesY_N4qq-JPjN8unyJ22isS9IZeuG5bpoawY5y2h3lo1vahyEejlnJ_W3ZlKw_Hp68xjO89OvJ2d-V0TBNxh3Fn4kslLEUlsTlGFhE8IEgZQiMaTrkjruMm15ZguEMomRCAgsci4nbBm6IsoC8QRGVV25Z8BM6EL8SOBMioQ64Eit4lBj8zCxNhKBB697I6rZSitDIccgS6vB0h4ck3mHBiRv3T6om0vVzRZVIgwi7TnEQ5lEf0l5YaXMZOQ4p7RpD97R4CiahDgCRnd3CbCfJGelxghC8E8wPHuw34-f6mbnXP32JQ9eDa9xXtFhia4cWpbaxHQEmeAnnq6Ge-izDJBmpqn0IN1whI2f2nxTXV-12t0IFFJSxPfgzeAz_zbW3v97_xzucSpHTAq9Yh9Gi2bpXiBGWhQvO8e_BfEHDu4 priority: 102 providerName: ProQuest – databaseName: Unpaywall dbid: UNPAY link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1Lb9QwEB5V2wNwoLxJH8gFJE4pie28jktFVCGxIMFKhUtkxw6t2CbVbiIev74zSTbdFIG4xqPInkfmm3j8GeBlaJNIyUgRn3bhSqGsq7SPpUphYi51LlTRdvnOwpO5fHcanG7B4foszMb-vcBy_PUK8y-CCI5f2e0wQLg9ge357OP0S3tqiEsXE5zXMQaN5Ud5pqXj__Oju5F1bnZE3mrKS_Xrh1osNtJNunN9aKfrMvl-1NT6KP99g8Pxnyu5B3d7sMmmnXfchy1bPoA7GxSEDyF9Tx157MOyPqu-ESpn6aL5Sf_W2CescKslS5VurxKyhtFPWza9qNA2VbNix9XX5Uyz9Hxx8Qjm6dvPxyduf7eCm2M6qt1AJIUIpTK5V_jaRAQVPClFlBPdS2y5TZThidGIcKJcIk4wWIpZYQrf6iDxxGOYlFVpnwLLfevjSzybx1hnexwrrtBXKO5HxgTCc-D52hLZZUehkWHpQUrJBqU48IZsNAgQ63X7AFWY9UGUFYiOiJIOYVIi0Y1iro2UiQws59RN7cArsnBGsYlmzFV_xADnSSxX2RSxCa4Es7YD-2snyPqgXWWILWWL8CIHDodhDDfaQ1GlRc2STEg7kxG-4knnM8OcpYfVZxxLB-KRN40WNR4pz89aSm_EDzER5TvwYnC8vytr97-k9uA2p8uKib9X7MOkXjb2ABFUrZ_1MXQFZW4Tyw priority: 102 providerName: Unpaywall |
| Title | Micro Orthogonal Fluxgate Sensor Fabricated with Amorphous CoZrNb Film |
| URI | https://www.ncbi.nlm.nih.gov/pubmed/40871884 https://www.proquest.com/docview/3244061517 https://www.proquest.com/docview/3246304973 https://pubmed.ncbi.nlm.nih.gov/PMC12389864 https://doi.org/10.3390/s25165022 https://doaj.org/article/f635121106694c3a82bd44945e221996 |
| UnpaywallVersion | publishedVersion |
| Volume | 25 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVFSB databaseName: Free Full-Text Journals in Chemistry (Selected full-text) customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: HH5 dateStart: 20010101 isFulltext: true titleUrlDefault: http://abc-chemistry.org/ providerName: ABC ChemistRy – providerCode: PRVAFT databaseName: Open Access Digital Library customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: KQ8 dateStart: 20010101 isFulltext: true titleUrlDefault: http://grweb.coalliance.org/oadl/oadl.html providerName: Colorado Alliance of Research Libraries – providerCode: PRVAFT databaseName: Open Access Digital Library customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: KQ8 dateStart: 20030101 isFulltext: true titleUrlDefault: http://grweb.coalliance.org/oadl/oadl.html providerName: Colorado Alliance of Research Libraries – providerCode: PRVAON databaseName: DOAJ Directory of Open Access Journals customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: DOA dateStart: 20010101 isFulltext: true titleUrlDefault: https://www.doaj.org/ providerName: Directory of Open Access Journals – providerCode: PRVEBS databaseName: EBSCOhost Academic Search Ultimate customDbUrl: https://search.ebscohost.com/login.aspx?authtype=ip,shib&custid=s3936755&profile=ehost&defaultdb=asn eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: ABDBF dateStart: 20081201 isFulltext: true titleUrlDefault: https://search.ebscohost.com/direct.asp?db=asn providerName: EBSCOhost – providerCode: PRVEBS databaseName: Inspec with Full Text customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: ADMLS dateStart: 20081201 isFulltext: true titleUrlDefault: https://www.ebsco.com/products/research-databases/inspec-full-text providerName: EBSCOhost – providerCode: PRVFQY databaseName: GFMER Free Medical Journals customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: GX1 dateStart: 20010101 isFulltext: true titleUrlDefault: http://www.gfmer.ch/Medical_journals/Free_medical.php providerName: Geneva Foundation for Medical Education and Research – providerCode: PRVFQY databaseName: GFMER Free Medical Journals customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: GX1 dateStart: 0 isFulltext: true titleUrlDefault: http://www.gfmer.ch/Medical_journals/Free_medical.php providerName: Geneva Foundation for Medical Education and Research – providerCode: PRVHPJ databaseName: ROAD: Directory of Open Access Scholarly Resources customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: M~E dateStart: 20010101 isFulltext: true titleUrlDefault: https://road.issn.org providerName: ISSN International Centre – providerCode: PRVAQN databaseName: PubMed Central customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: RPM dateStart: 20030101 isFulltext: true titleUrlDefault: https://www.ncbi.nlm.nih.gov/pmc/ providerName: National Library of Medicine – providerCode: PRVPQU databaseName: Health & Medical Collection customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: 7X7 dateStart: 20010101 isFulltext: true titleUrlDefault: https://search.proquest.com/healthcomplete providerName: ProQuest – providerCode: PRVPQU databaseName: ProQuest Central customDbUrl: http://www.proquest.com/pqcentral?accountid=15518 eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: BENPR dateStart: 20010101 isFulltext: true titleUrlDefault: https://www.proquest.com/central providerName: ProQuest – providerCode: PRVPQU databaseName: ProQuest Technology Collection customDbUrl: eissn: 1424-8220 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: 8FG dateStart: 20010101 isFulltext: true titleUrlDefault: https://search.proquest.com/technologycollection1 providerName: ProQuest – providerCode: PRVFZP databaseName: Scholars Portal Journals: Open Access customDbUrl: eissn: 1424-8220 dateEnd: 20250930 omitProxy: true ssIdentifier: ssj0023338 issn: 1424-8220 databaseCode: M48 dateStart: 20030101 isFulltext: true titleUrlDefault: http://journals.scholarsportal.info providerName: Scholars Portal |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lb5wwEB6lyaHtoeq7tOnKfUg90YBtMByqahOFRpWyjdqutO0FGWySSARSdldN_n1nWBYtfVx64QAW4Jkx8322-QbgdWhjpaXSpKdduFJo6-rMR6pSmIjLLBe6aHf5TsKjqfw4C2ZbsK6x2Rlw_ldqR_Wkpk359urH9Xsc8O-IcSJl35tjjkagwfFLvIMJKqYKDseyX0zgAmnYSlRo2HyQilrF_j-_yxuJ6fdNkzeX1aW-_qnLciMjJXfhTgcl2Xjl-3uwZav7cHtDYPABJMe03459ahZn9SlhbpaUyyuaOWNfkL_WDUt01hYKsobRlCwbX9Ro-Xo5Zwf192aSseS8vHgI0-Tw68GR21VOcHNMNgs3EHEhQqlN7hV-ZhQBAU9KoXISc4kst7E2PDYZ4heVS0QBBomWFabwbRbEnngE21Vd2SfAct_6eBPP5hGyaI8jnwp9jc19ZUwgPAdero2YXq4EMlIkFmTptLe0A_tk3r4BaVq3J-rmNO2GSFog9iHBOQRBscQgiXhmpIxlYDmnvdIOvCHnpBQL6IFcdz8Q4HuShlU6RuSBPcGc7MDu2n_pOqJSRI6yxW_KgRf9ZRxMtEKiK4uWpTYhrTsqvMXjlbv7d5Yecssokg5Eg0AYdGp4pTo_awW7ER1EJIPvwKs-Zv5trKf__4BncItTfWKS7BW7sL1olvY5gqZFNoIbaqbwGCUfRrCzfzg5-TxqJyBG7WDBc9PJyfjbLyXwG8E |
| linkProvider | Scholars Portal |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB6VcigcKt4ECpiXOEVNbOd1QGgpRFvaLgdaacUlOLHTVtom2-yuSv8Uv5GZvLoLgluviWU58_A3Y0--AXjjmyhQMlDEp53bUihjq9TFVCXXIZdpJlReV_mO_OGR_DL2xmvwq_sXhsoquz2x3qh1mdEZ-TYCv6zhN_gwPbepaxTdrnYtNBqz2DOXF5iyzd7vfkL9vuU8_ny4M7TbrgJ2hhvx3PZElAtfKp05uZvqgEDSkVIEGRGdhIabSGke6RSxPcgkIqTGJMQInbsm9SJH4Lw34KYUuJeg_wTjqwRPYL7XsBcJETnbM4wdMADifAXz6tYAfwPAEgL-WZ25sSim6vJCTSZL0Bffgc02ZmWDxsjuwpop7sHtJSbD-xAfUGEf-1rNT8pjCu5ZPFn8pCM69g0T5bJisUrrjkRGMzr7ZYOzElVcLmZsp_xejVIWn07OHsDRtQjzIawXZWEeA8tc4-IkjslCTNcdjomb7yoc7gZae8Kx4FUnxGTaMHEkmMGQpJNe0hZ8JPH2A4g8u35QVsdJ64tJjkEWMdthtBVJtMaQp1rKSHqGcyrKtuAdKSchF0cNZKr9UwHXSWRZyQBDHPwSBH8Ltjr9Ja3vz5IrS7XgZf8avZauYlRhULI0xqcLzgCneNSou1-zdDCJDUNpQbhiCCsftfqmOD2pmcExDAmJb9-C173N_FtYT_6_-hewMTw82E_2d0d7T-EWp8bHxAUstmB9Xi3MM4zG5unz2gUY_Lhun_sNUPFD2Q |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB6VIkE5IN4NFDAv9RRtYjuvA0JLS9RSWJCg0opLcGKnrbRNluyuSv8av46ZvLoLgluvsWU58_DMF0--AXjpmyhQMlDEp53bUihjq9RFqJLrkMs0Eyqvq3xH_t6hfD_2xmvwq_sXhsoquzOxPqh1mdE38gEGflmH32CQt2URn3fjN9MfNnWQopvWrp1GYyIH5vwM4dvs9f4u6voV5_G7rzt7dtthwM7wUJ7bnohy4UulMyd3Ux1QwHSkFEFGpCeh4SZSmkc6xTgfZBKjpUZAYoTOXZN6kSNw3StwNRAionLCYHwB9gRiv4bJCAedwQzzCEyGOF-Jf3WbgL-DwVI0_LNS8_qimKrzMzWZLIXB-BbcbPNXNmwM7jasmeIO3FhiNbwL8Ucq8mOfqvlxeUSJPosni5_0uY59QdBcVixWad2dyGhG34HZ8LREdZeLGdspv1WjlMUnk9N7cHgpwrwP60VZmE1gmWtcXMQxWYjQ3eEI4nxX4XQ30NoTjgXPOyEm04aVI0E0Q5JOeklb8JbE208gIu36QVkdJa1fJjkmXMRyh5lXJNEyQ55qKSPpGc6pQNuCbVJOQu6OGshU-9cC7pOIs5Ihpjv4JpgIWLDV6S9pz4FZcmG1Fjzrh9GD6VpGFQYlS3N8uuwMcIkHjbr7PUsHAW0YSgvCFUNYeanVkeLkuGYJx5QkJO59C170NvNvYT38_-6fwjX0tuTD_ujgEWxw6oFMtMBiC9bn1cI8xsRsnj6pPYDB98t2ud-0ZEgc |
| linkToUnpaywall | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1Lb9QwEB5V2wNwoLxJH8gFJE4pie28jktFVCGxIMFKhUtkxw6t2CbVbiIev74zSTbdFIG4xqPInkfmm3j8GeBlaJNIyUgRn3bhSqGsq7SPpUphYi51LlTRdvnOwpO5fHcanG7B4foszMb-vcBy_PUK8y-CCI5f2e0wQLg9ge357OP0S3tqiEsXE5zXMQaN5Ud5pqXj__Oju5F1bnZE3mrKS_Xrh1osNtJNunN9aKfrMvl-1NT6KP99g8Pxnyu5B3d7sMmmnXfchy1bPoA7GxSEDyF9Tx157MOyPqu-ESpn6aL5Sf_W2CescKslS5VurxKyhtFPWza9qNA2VbNix9XX5Uyz9Hxx8Qjm6dvPxyduf7eCm2M6qt1AJIUIpTK5V_jaRAQVPClFlBPdS2y5TZThidGIcKJcIk4wWIpZYQrf6iDxxGOYlFVpnwLLfevjSzybx1hnexwrrtBXKO5HxgTCc-D52hLZZUehkWHpQUrJBqU48IZsNAgQ63X7AFWY9UGUFYiOiJIOYVIi0Y1iro2UiQws59RN7cArsnBGsYlmzFV_xADnSSxX2RSxCa4Es7YD-2snyPqgXWWILWWL8CIHDodhDDfaQ1GlRc2STEg7kxG-4knnM8OcpYfVZxxLB-KRN40WNR4pz89aSm_EDzER5TvwYnC8vytr97-k9uA2p8uKib9X7MOkXjb2ABFUrZ_1MXQFZW4Tyw |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Micro+Orthogonal+Fluxgate+Sensor+Fabricated+with+Amorphous+CoZrNb+Film&rft.jtitle=Sensors+%28Basel%2C+Switzerland%29&rft.au=Kim%2C+Kyung-Won&rft.au=Hong%2C+Sung-Min&rft.au=Lee%2C+Daesung&rft.au=Shin%2C+Kwang-Ho&rft.date=2025-08-13&rft.pub=MDPI&rft.eissn=1424-8220&rft.volume=25&rft.issue=16&rft_id=info:doi/10.3390%2Fs25165022&rft.externalDocID=PMC12389864 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1424-8220&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1424-8220&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1424-8220&client=summon |