Microstructure and plasma corrosion behavior of yttria coatings prepared by the aerosol deposition method
Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y2O3) coatings prepared via aerosol deposition (AD) have demonstrated superior plasma resistance in the reduction of particle contamination. The superior particle contamin...
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| Published in | Journal of the American Ceramic Society Vol. 103; no. 12; pp. 7031 - 7040 |
|---|---|
| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
Columbus
Wiley
01.12.2020
Wiley Subscription Services, Inc |
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| Online Access | Get full text |
| ISSN | 0002-7820 1551-2916 |
| DOI | 10.1111/jace.17193 |
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| Abstract | Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y2O3) coatings prepared via aerosol deposition (AD) have demonstrated superior plasma resistance in the reduction of particle contamination. The superior particle contamination performance of Y2O3 coatings prepared by AD has been speculatively attributed to its unique microstructure; however, the relationship between the coatings’ microstructure and plasma corrosion behavior has been insufficiently clarified. Herein, we investigated the relationship between the microstructure and plasma corrosion behavior of Y2O3 coatings prepared by the AD method and compared the results with those for coatings prepared by other coating methods. When internal pores are present, these internal pores were selectively plasma corroded; plasma corrosion marks reflecting their pore shape were formed, and the surface roughness increased with increasing plasma exposure time. However, when no internal pores were present, as in the case of the AD coating, the surfaces were homogeneously corroded and maintained their initial surface. As the risk of particle contamination caused by the corrosion of the plasma‐resistant coatings is greatly increased with surface roughness, we concluded that the Y2O3 coating prepared via AD will contribute greatly to reducing particle contamination. |
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| AbstractList | Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y2O3) coatings prepared via aerosol deposition (AD) have demonstrated superior plasma resistance in the reduction of particle contamination. The superior particle contamination performance of Y2O3 coatings prepared by AD has been speculatively attributed to its unique microstructure; however, the relationship between the coatings’ microstructure and plasma corrosion behavior has been insufficiently clarified. Herein, we investigated the relationship between the microstructure and plasma corrosion behavior of Y2O3 coatings prepared by the AD method and compared the results with those for coatings prepared by other coating methods. When internal pores are present, these internal pores were selectively plasma corroded; plasma corrosion marks reflecting their pore shape were formed, and the surface roughness increased with increasing plasma exposure time. However, when no internal pores were present, as in the case of the AD coating, the surfaces were homogeneously corroded and maintained their initial surface. As the risk of particle contamination caused by the corrosion of the plasma‐resistant coatings is greatly increased with surface roughness, we concluded that the Y2O3 coating prepared via AD will contribute greatly to reducing particle contamination. Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y 2 O 3 ) coatings prepared via aerosol deposition (AD) have demonstrated superior plasma resistance in the reduction of particle contamination. The superior particle contamination performance of Y 2 O 3 coatings prepared by AD has been speculatively attributed to its unique microstructure; however, the relationship between the coatings’ microstructure and plasma corrosion behavior has been insufficiently clarified. Herein, we investigated the relationship between the microstructure and plasma corrosion behavior of Y 2 O 3 coatings prepared by the AD method and compared the results with those for coatings prepared by other coating methods. When internal pores are present, these internal pores were selectively plasma corroded; plasma corrosion marks reflecting their pore shape were formed, and the surface roughness increased with increasing plasma exposure time. However, when no internal pores were present, as in the case of the AD coating, the surfaces were homogeneously corroded and maintained their initial surface. As the risk of particle contamination caused by the corrosion of the plasma‐resistant coatings is greatly increased with surface roughness, we concluded that the Y 2 O 3 coating prepared via AD will contribute greatly to reducing particle contamination. |
| Author | Kiyohara Masakatsu Hiroaki Ashizawa Katsumi Yoshida |
| Author_xml | – sequence: 1 givenname: Hiroaki orcidid: 0000-0002-1025-9441 surname: Ashizawa fullname: Ashizawa, Hiroaki email: hiroaki.ashizawa@jp.toto.com organization: Tokyo Institute of Technology – sequence: 2 givenname: Kiyohara surname: Masakatsu fullname: Masakatsu, Kiyohara organization: TOTO Ltd – sequence: 3 givenname: Katsumi surname: Yoshida fullname: Yoshida, Katsumi organization: Tokyo Institute of Technology |
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| CitedBy_id | crossref_primary_10_1016_j_ceramint_2024_01_436 crossref_primary_10_1016_j_apsusc_2023_158359 crossref_primary_10_1016_j_ceramint_2022_12_267 crossref_primary_10_1016_j_ceramint_2024_08_154 crossref_primary_10_3390_ma17143533 crossref_primary_10_1016_j_mtcomm_2022_105267 crossref_primary_10_1016_j_apsusc_2024_162050 crossref_primary_10_1016_j_surfcoat_2024_131448 crossref_primary_10_3390_coatings13010091 crossref_primary_10_1016_j_apsusc_2025_162960 crossref_primary_10_1016_j_ceramint_2025_01_431 crossref_primary_10_1002_adem_202100255 crossref_primary_10_1111_ijac_13880 crossref_primary_10_1016_j_surfcoat_2024_130921 crossref_primary_10_1111_jace_20501 |
| Cites_doi | 10.2320/matertrans.47.1677 10.2109/jcersj2.117.863 10.7567/JJAP.56.06HC02 10.1007/s11666-008-9285-y 10.3390/nano7070183 10.1016/j.tsf.2011.04.049 10.1116/1.5026777 10.1116/1.3112624 10.1143/JJAP.47.3630 10.1116/1.4975143 10.1109/TSM.2017.2752752 10.1002/0471790281 10.1016/S0272-8842(02)00220-1 10.1016/j.ceramint.2019.07.093 10.1007/s11666-008-9163-7 10.1016/j.apsusc.2016.01.092 10.1016/j.tsf.2003.12.113 10.1111/j.1551-2916.2007.01738.x 10.1016/j.surfcoat.2016.11.007 10.7567/1347-4065/ab1636 |
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| Snippet | Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y2O3) coatings prepared via... Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y 2 O 3 ) coatings prepared... |
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| SubjectTerms | aerosol deposition Coatings Contamination Corrosion Corrosion resistance Deposition Dew Etching equipment Microstructure Plasma etching Porosity Surface roughness yttrium compounds Yttrium oxide |
| Title | Microstructure and plasma corrosion behavior of yttria coatings prepared by the aerosol deposition method |
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