A framework for determining MIMO process parameters by a neuro-DM&ACO approach - Wong, J.-T.; Su, C.-T.; Hsieh, H.-T. (International journal of production research, 2007)
Keywords: Ant colony optimisation (ACO); Applied sciences; Artificial neural network (ANN); Chemical-mechanical planarisation (CMP); Computer science; control theory; systems; Data mining; Data processing. List processing. Character string processing; Electronics; Exact sciences and technology; Inventory control, production control. Distribution; Memory organisation. Data processing; Microelectronic fabrication (materials and surfaces technology); Neural networks; Operational research and scientific management; Operational research. Management science; Optimization algorithms; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Semiconductors; Simulation; Software; Studies; Capability index; MIMO system; Data analysis; Mechanical polishing; Decision making; Chemical polishing; Data processing; Information extraction; Artificial neural network (ANN); Neural network; Data mining; Ant colony optimisation (ACO); Operating conditions; Microelectronic fabrication; Planarization; Manufacturing process; Chemical-mechanical planarisation (CMP); Swarm intelligence; Production process