Parametric study on excitation temperature and electron temperature in low pressure plasmas - Park, Hoyong; Choe, Wonho (Current applied physics, 2010)
Keywords: Calibration; Diagnostic systems; Direct current; Electron density; Electron temperature; Excitation; Excitation temperature; Langmuir probe; Low pressure; Optical emission spectroscopy; Plasmas; 물리학; Langmuir probe; Optical emission spectroscopy; Excitation temperature; Electron temperature