The reason of degradation in electrical properties of ZnO:Al thin films annealed with various post-annealing temperature - Kim, Deok-Kyu; Kim, Hong Bae (Current applied physics, 2013)
Keywords: absorption; Annealing; Carrier density; Density; electrical conductivity; Electrical properties; glass; Magnetron sputtering; O2 absorption; oxygen; Post-annealing; RF magnetron sputtering; temperature; Thin films; X-ray photoelectron spectroscopy; Zinc oxide; ZnO:Al; 물리학; RF magnetron sputtering; Post-annealing; ZnO:Al; O2 absorption