Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates

The previous decades have seen a massive increase in the research towards reproducible and optimized surface-enhanced Raman spectroscopy (SERS) substrates. While traditional colloidal synthesis methods have commonly been used for SERS substrate fabrication, they lack reproducibility hindering their...

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Published inMicro and Nano Engineering Vol. 23; p. 100267
Main Authors Srivastava, K., Le-The, H., Lozeman, J.J.A., van den Berg, A., van der Stam, W., Odijk, M.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.06.2024
Elsevier
Subjects
Enhancement factor
Lithography
Nanofabrication
Surface-enhanced Raman spectroscopy
Nanofabrication
Enhancement factor
Lithography
Surface-enhanced Raman spectroscopy
Online AccessGet full text
ISSN2590-0072
2590-0072
DOI10.1016/j.mne.2024.100267

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Abstract The previous decades have seen a massive increase in the research towards reproducible and optimized surface-enhanced Raman spectroscopy (SERS) substrates. While traditional colloidal synthesis methods have commonly been used for SERS substrate fabrication, they lack reproducibility hindering their usage for many applications. The need for reproducible nanostructures showing high orders of enhancement factors has brought about a shift in the methods one can use to fabricate SERS nanostructures. Lithographic techniques have thus piqued the interest of researchers as a viable option for SERS substrate fabrication. Not only do they offer high enhancement factors and reproducible nanostructures, they also provide the ability to fabricate nanostructures with many different geometries, shapes, sizes and periodicities. Some of the most established lithographic techniques include electron beam lithography, nanosphere lithography, laser interference lithography and many more. This review discusses established lithographic techniques, such as mentioned above, along with other upcoming lithographic techniques to understand the principles and the methodology behind them. A deep understanding of how various parameters can influence the nanostructure fabrication and thereby influence the SERS enhancement is developed. A detailed description of how these nanostructures can be fabricated is also provided for better insight. In addition, strengths and limitations of each method are discussed in detail. Lastly, we also discuss the applicability of SERS substrates for commercial applications comparing the performance of chemical synthesis routes and lithography for SERS substrate fabrication. This review serves as a base to understand the concept and application of SERS from a microfabrication perspective. [Display omitted] •Detailed discussion on fabrication techniques for lithographic surface-enhanced Raman spectroscopy substrates.•Comparative overview of established lithographic techniques for surface-enhanced Raman spectroscopy substrates.•Overview of various fabrication methods for surface-enhanced Raman spectroscopy substrates in a commercial market.•Discussion on alternative and innovative methods for fabrication of surface-enhanced Raman spectroscopy substrates.
AbstractList The previous decades have seen a massive increase in the research towards reproducible and optimized surface-enhanced Raman spectroscopy (SERS) substrates. While traditional colloidal synthesis methods have commonly been used for SERS substrate fabrication, they lack reproducibility hindering their usage for many applications. The need for reproducible nanostructures showing high orders of enhancement factors has brought about a shift in the methods one can use to fabricate SERS nanostructures. Lithographic techniques have thus piqued the interest of researchers as a viable option for SERS substrate fabrication. Not only do they offer high enhancement factors and reproducible nanostructures, they also provide the ability to fabricate nanostructures with many different geometries, shapes, sizes and periodicities. Some of the most established lithographic techniques include electron beam lithography, nanosphere lithography, laser interference lithography and many more. This review discusses established lithographic techniques, such as mentioned above, along with other upcoming lithographic techniques to understand the principles and the methodology behind them. A deep understanding of how various parameters can influence the nanostructure fabrication and thereby influence the SERS enhancement is developed. A detailed description of how these nanostructures can be fabricated is also provided for better insight. In addition, strengths and limitations of each method are discussed in detail. Lastly, we also discuss the applicability of SERS substrates for commercial applications comparing the performance of chemical synthesis routes and lithography for SERS substrate fabrication. This review serves as a base to understand the concept and application of SERS from a microfabrication perspective.
The previous decades have seen a massive increase in the research towards reproducible and optimized surface-enhanced Raman spectroscopy (SERS) substrates. While traditional colloidal synthesis methods have commonly been used for SERS substrate fabrication, they lack reproducibility hindering their usage for many applications. The need for reproducible nanostructures showing high orders of enhancement factors has brought about a shift in the methods one can use to fabricate SERS nanostructures. Lithographic techniques have thus piqued the interest of researchers as a viable option for SERS substrate fabrication. Not only do they offer high enhancement factors and reproducible nanostructures, they also provide the ability to fabricate nanostructures with many different geometries, shapes, sizes and periodicities. Some of the most established lithographic techniques include electron beam lithography, nanosphere lithography, laser interference lithography and many more. This review discusses established lithographic techniques, such as mentioned above, along with other upcoming lithographic techniques to understand the principles and the methodology behind them. A deep understanding of how various parameters can influence the nanostructure fabrication and thereby influence the SERS enhancement is developed. A detailed description of how these nanostructures can be fabricated is also provided for better insight. In addition, strengths and limitations of each method are discussed in detail. Lastly, we also discuss the applicability of SERS substrates for commercial applications comparing the performance of chemical synthesis routes and lithography for SERS substrate fabrication. This review serves as a base to understand the concept and application of SERS from a microfabrication perspective. [Display omitted] •Detailed discussion on fabrication techniques for lithographic surface-enhanced Raman spectroscopy substrates.•Comparative overview of established lithographic techniques for surface-enhanced Raman spectroscopy substrates.•Overview of various fabrication methods for surface-enhanced Raman spectroscopy substrates in a commercial market.•Discussion on alternative and innovative methods for fabrication of surface-enhanced Raman spectroscopy substrates.
ArticleNumber 100267
Author Lozeman, J.J.A.
van der Stam, W.
van den Berg, A.
Srivastava, K.
Odijk, M.
Le-The, H.
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Keywords Nanofabrication
Enhancement factor
Lithography
Surface-enhanced Raman spectroscopy
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Snippet The previous decades have seen a massive increase in the research towards reproducible and optimized surface-enhanced Raman spectroscopy (SERS) substrates....
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SubjectTerms Enhancement factor
Lithography
Nanofabrication
Surface-enhanced Raman spectroscopy
Title Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates
URI https://dx.doi.org/10.1016/j.mne.2024.100267
https://doaj.org/article/d83efcbaaa644e7399a2f6673e08595b
Volume 23
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