Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection - Wakabayashi, Shin'ichi; Nagayama, Shinobu; Yamamoto, Masahiro; Kataoka, Gaku; Inagi, Masato (IPSJ Transactions on System and LSI Design Methodology, 2023)
Keywords: classification accuracy; hotspot; Lithography; Machine learning; Short circuits