Performance and reliability of new CMUT design with improved efficiency - Jeong, Byung-Gil; Kim, Dong-Kyun; Hong, Seog-Woo; Chung, Seok-Whan; Shin, Hyung-Jae (Sensors and actuators. A. Physical., 2013)
Keywords: Actuators; Bridges (structures); Capacitive micro-machined ultrasonic transducer (CMUT); Clamping; Durability; Efficiency; humidity; Mean time to failure; Piston-like motion; Plates (structural members); Reliability; stress tolerance; temperature; Transducers; Vibration; Capacitive micro-machined ultrasonic transducer (CMUT); Reliability; Efficiency; Piston-like motion