Characterization and in-situ monitoring of sub-stoichiometric adjustable superconducting critical temperature titanium nitride growth - Vissers, Michael R.; Gao, Jiansong; Kline, Jeffrey S.; Sandberg, Martin; Weides, Martin P.; Wisbey, David S.; Pappas, David P. (Thin solid films, 2013)
Keywords: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Electronic transport phenomena in thin films and low-dimensional structures; Ellipsometry; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Sputtering; Sub-stoichiometric; Superconductivity; Superconductors; Theory and models of film growth; Titanium nitride; Transition temperature variations; X-ray diffraction; Titanium nitride; X-ray diffraction; Superconductors; Sputtering; Sub-stoichiometric; Ellipsometry; Transition temperature; Spectroscopic ellipsometry; Electrical properties; Superconducting transitions; Process control; XRD; Thin films; Wafers; Growth mechanism; Physical vapor deposition; Reactive sputtering; Critical temperature