Characterization and in-situ monitoring of sub-stoichiometric adjustable superconducting critical temperature titanium nitride growth

The structural and electrical properties of Ti–N films deposited by reactive sputtering depend on their growth parameters, in particular the Ar:N2 gas ratio. We show that the nitrogen percentage changes the crystallographic phase of the film progressively from pure α-Ti, through an α-Ti phase with i...

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Published inThin solid films Vol. 548; pp. 485 - 488
Main Authors Vissers, Michael R., Gao, Jiansong, Kline, Jeffrey S., Sandberg, Martin, Weides, Martin P., Wisbey, David S., Pappas, David P.
Format Journal Article
LanguageEnglish
Published Amsterdam Elsevier B.V 02.12.2013
Elsevier
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ISSN0040-6090
1879-2731
DOI10.1016/j.tsf.2013.07.046

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Abstract The structural and electrical properties of Ti–N films deposited by reactive sputtering depend on their growth parameters, in particular the Ar:N2 gas ratio. We show that the nitrogen percentage changes the crystallographic phase of the film progressively from pure α-Ti, through an α-Ti phase with interstitial nitrogen, to stoichiometric Ti2N, and through a substoichiometric TiNx to stoichiometric TiN. These changes also affect the superconducting transition temperature, TC, allowing, the superconducting properties to be tailored for specific applications. After decreasing from a TC of 0.4K for pure Ti down to below 50mK at the Ti2N point, the TC then increases rapidly up to nearly 5K over a narrow range of nitrogen incorporation. This very sharp increase of TC makes it difficult to control the properties of the film from wafer-to-wafer as well as across a given wafer to within acceptable margins for device fabrication. Here we show that the nitrogen composition and hence the superconductive properties are related to, and can be determined by, spectroscopic ellipsometry. Therefore, this technique may be used for process control and wafer screening prior to investing time in processing devices. Contribution of the U.S. government, not subject to copyright. •Properties of reactively sputtered TiNx are controlled by argon:nitrogen process gas ratio.•The superconducting transition temperature, Tc, is reduced for lower nitrogen content.•Lower nitrogen content corresponds to greater (111) TiN and Ti2N texture.•The optical properties of TiNx are related to these compositional changes.•The position dependence of the optical properties predicts the Tc variation.
AbstractList The structural and electrical properties of Ti–N films deposited by reactive sputtering depend on their growth parameters, in particular the Ar:N2 gas ratio. We show that the nitrogen percentage changes the crystallographic phase of the film progressively from pure α-Ti, through an α-Ti phase with interstitial nitrogen, to stoichiometric Ti2N, and through a substoichiometric TiNx to stoichiometric TiN. These changes also affect the superconducting transition temperature, TC, allowing, the superconducting properties to be tailored for specific applications. After decreasing from a TC of 0.4K for pure Ti down to below 50mK at the Ti2N point, the TC then increases rapidly up to nearly 5K over a narrow range of nitrogen incorporation. This very sharp increase of TC makes it difficult to control the properties of the film from wafer-to-wafer as well as across a given wafer to within acceptable margins for device fabrication. Here we show that the nitrogen composition and hence the superconductive properties are related to, and can be determined by, spectroscopic ellipsometry. Therefore, this technique may be used for process control and wafer screening prior to investing time in processing devices. Contribution of the U.S. government, not subject to copyright. •Properties of reactively sputtered TiNx are controlled by argon:nitrogen process gas ratio.•The superconducting transition temperature, Tc, is reduced for lower nitrogen content.•Lower nitrogen content corresponds to greater (111) TiN and Ti2N texture.•The optical properties of TiNx are related to these compositional changes.•The position dependence of the optical properties predicts the Tc variation.
Author Wisbey, David S.
Kline, Jeffrey S.
Sandberg, Martin
Gao, Jiansong
Weides, Martin P.
Pappas, David P.
Vissers, Michael R.
Author_xml – sequence: 1
  givenname: Michael R.
  surname: Vissers
  fullname: Vissers, Michael R.
  email: michael.vissers@nist.gov
– sequence: 2
  givenname: Jiansong
  surname: Gao
  fullname: Gao, Jiansong
– sequence: 3
  givenname: Jeffrey S.
  surname: Kline
  fullname: Kline, Jeffrey S.
– sequence: 4
  givenname: Martin
  surname: Sandberg
  fullname: Sandberg, Martin
– sequence: 5
  givenname: Martin P.
  surname: Weides
  fullname: Weides, Martin P.
– sequence: 6
  givenname: David S.
  surname: Wisbey
  fullname: Wisbey, David S.
– sequence: 7
  givenname: David P.
  surname: Pappas
  fullname: Pappas, David P.
  email: david.pappas@nist.gov
BackLink http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=28250175$$DView record in Pascal Francis
BookMark eNp9kLFuFDEQhi0UpFxCHiCdG8pdxmvv7q2o0AkCUiQaqC2vPc7N6dY-2V4Q9Lx3fDpEQZFqivm_XzPfDbsKMSBj9wJaAWJ4d2hL9m0HQrYwtqCGV2wjtuPUdKMUV2wDoKAZYIJrdpPzAQBE18kN-7Pbm2RswUS_TaEYuAmOU2gylZUvMVCJicITj57ndW5yiWT3FBcsiSw37rDmYuYj1u0Jk43BrbacAZuokDVHXnCpG1PWhLxQMYHWhdfeRA75U4o_y_4Ne-3NMePd33nLvn_6-G33uXn8-vBl9-GxsXKSpemFm3voRzUN287ZyfYg-wFmpbaz8YhWoRXgvJFzJ9WgnJPoh9lIMyiUXslb9vbSezK5nuaTCZayPiVaTPqlu23Xgxj7mhOXnE0x54T-X0SAPvvWB11967NvDaOuvisz_sfY-uxZaUmGji-S7y8k1td_ECadLWGw6CihLdpFeoF-Bi-UofA
CODEN THSFAP
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ContentType Journal Article
Copyright 2013
2015 INIST-CNRS
Copyright_xml – notice: 2013
– notice: 2015 INIST-CNRS
DBID AAYXX
CITATION
IQODW
DOI 10.1016/j.tsf.2013.07.046
DatabaseName CrossRef
Pascal-Francis
DatabaseTitle CrossRef
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
Physics
EISSN 1879-2731
EndPage 488
ExternalDocumentID 28250175
10_1016_j_tsf_2013_07_046
S0040609013012297
GroupedDBID --K
--M
-~X
.DC
.~1
0R~
123
1B1
1RT
1~.
1~5
4.4
457
4G.
5VS
7-5
71M
8P~
9JN
AABNK
AABXZ
AACTN
AAEDT
AAEDW
AAEPC
AAIAV
AAIKJ
AAKOC
AALRI
AAOAW
AAQFI
AAXUO
ABFNM
ABFRF
ABJNI
ABMAC
ABNEU
ABXDB
ABXRA
ABYKQ
ACBEA
ACDAQ
ACFVG
ACGFO
ACGFS
ACRLP
ADBBV
ADEZE
AEBSH
AEFWE
AEKER
AENEX
AEZYN
AFKWA
AFRZQ
AFTJW
AGUBO
AGYEJ
AHHHB
AIEXJ
AIKHN
AITUG
AIVDX
AJBFU
AJOXV
ALMA_UNASSIGNED_HOLDINGS
AMFUW
AMRAJ
AXJTR
BKOJK
BLXMC
CS3
DU5
EBS
EFJIC
EFLBG
EJD
EO8
EO9
EP2
EP3
F5P
FDB
FIRID
FNPLU
FYGXN
G-Q
GBLVA
IHE
J1W
KOM
M24
M38
M41
MAGPM
MO0
N9A
O-L
O9-
OAUVE
OGIMB
OZT
P-8
P-9
P2P
PC.
Q38
RNS
ROL
RPZ
SDF
SDG
SDP
SES
SPC
SPCBC
SPD
SSM
SSQ
SSZ
T5K
TWZ
WH7
ZMT
~G-
29Q
6TJ
AAQXK
AATTM
AAXKI
AAYJJ
AAYWO
AAYXX
ABDPE
ABWVN
ACLOT
ACNNM
ACRPL
ACVFH
ADCNI
ADMUD
ADNMO
AEIPS
AEUPX
AFFNX
AFJKZ
AFPUW
AGHFR
AGQPQ
AIGII
AIIUN
AKBMS
AKRWK
AKYEP
ANKPU
APXCP
ASPBG
AVWKF
AZFZN
BBWZM
CITATION
EFKBS
FEDTE
FGOYB
G-2
HMV
HVGLF
HX~
HZ~
NDZJH
R2-
SEW
SMS
SPG
VOH
WUQ
~HD
BNPGV
IQODW
RIG
SSH
ID FETCH-LOGICAL-c393t-51db505749682dc9c503560b448bafeec4ec10dfa3b23464dd3ef6ba3a64e3f43
IEDL.DBID .~1
ISSN 0040-6090
IngestDate Wed Apr 02 07:24:00 EDT 2025
Wed Oct 01 01:28:26 EDT 2025
Thu Apr 24 22:58:09 EDT 2025
Fri Feb 23 02:14:02 EST 2024
IsPeerReviewed true
IsScholarly true
Keywords Titanium nitride
X-ray diffraction
Superconductors
Sputtering
Sub-stoichiometric
Ellipsometry
Transition temperature
Spectroscopic ellipsometry
Electrical properties
Superconducting transitions
Process control
XRD
Thin films
Wafers
Growth mechanism
Physical vapor deposition
Reactive sputtering
Critical temperature
Language English
License https://www.elsevier.com/tdm/userlicense/1.0
CC BY 4.0
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c393t-51db505749682dc9c503560b448bafeec4ec10dfa3b23464dd3ef6ba3a64e3f43
PageCount 4
ParticipantIDs pascalfrancis_primary_28250175
crossref_primary_10_1016_j_tsf_2013_07_046
crossref_citationtrail_10_1016_j_tsf_2013_07_046
elsevier_sciencedirect_doi_10_1016_j_tsf_2013_07_046
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2013-12-02
PublicationDateYYYYMMDD 2013-12-02
PublicationDate_xml – month: 12
  year: 2013
  text: 2013-12-02
  day: 02
PublicationDecade 2010
PublicationPlace Amsterdam
PublicationPlace_xml – name: Amsterdam
PublicationTitle Thin solid films
PublicationYear 2013
Publisher Elsevier B.V
Elsevier
Publisher_xml – name: Elsevier B.V
– name: Elsevier
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SSID ssj0001223
Score 2.2907586
Snippet The structural and electrical properties of Ti–N films deposited by reactive sputtering depend on their growth parameters, in particular the Ar:N2 gas ratio....
SourceID pascalfrancis
crossref
elsevier
SourceType Index Database
Enrichment Source
Publisher
StartPage 485
SubjectTerms Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science; rheology
Deposition by sputtering
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronic transport phenomena in thin films and low-dimensional structures
Ellipsometry
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Sputtering
Sub-stoichiometric
Superconductivity
Superconductors
Theory and models of film growth
Titanium nitride
Transition temperature variations
X-ray diffraction
Title Characterization and in-situ monitoring of sub-stoichiometric adjustable superconducting critical temperature titanium nitride growth
URI https://dx.doi.org/10.1016/j.tsf.2013.07.046
Volume 548
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
journalDatabaseRights – providerCode: PRVESC
  databaseName: Baden-Württemberg Complete Freedom Collection (Elsevier)
  customDbUrl:
  eissn: 1879-2731
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0001223
  issn: 0040-6090
  databaseCode: GBLVA
  dateStart: 20110101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
– providerCode: PRVESC
  databaseName: Elsevier E-journals (Freedom Collection)
  customDbUrl:
  eissn: 1879-2731
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0001223
  issn: 0040-6090
  databaseCode: ACRLP
  dateStart: 19950101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
– providerCode: PRVESC
  databaseName: Elsevier ScienceDirect Freedom Collection Journals
  customDbUrl:
  eissn: 1879-2731
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0001223
  issn: 0040-6090
  databaseCode: AIKHN
  dateStart: 19950101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
– providerCode: PRVESC
  databaseName: Elsevier SD Freedom Collection
  customDbUrl:
  eissn: 1879-2731
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0001223
  issn: 0040-6090
  databaseCode: .~1
  dateStart: 19950101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
– providerCode: PRVLSH
  databaseName: Elsevier Journals
  customDbUrl:
  mediaType: online
  eissn: 1879-2731
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0001223
  issn: 0040-6090
  databaseCode: AKRWK
  dateStart: 19670701
  isFulltext: true
  providerName: Library Specific Holdings
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8NAEF5EERQRn_gse_AkRJPsJjZHKZZqoQex2FvYp0ZqLE169eb_dmaTVAvSg6eQ7E4SdibzyM58Q8hFEljLJQ88GbUN_rrRnuAy8ERoVay5bkvpEmQHcW_IH0bRaIV0mloYTKusdX-l0522rq9c16t5PckyrPEFY-QnuPUWhGGCFeWI_gUyffX5k-YBQ_PMOZzd7Gy6HK-ycCiezOF3og_8t23amogCVsxWrS5-2Z_uDtmuHUd6W73bLlkx-R7Z_AUnuEfWXTqnKvbJV2eOw1yVWVKRa5rlXpGVM_ruvmOkoR-WFjPpgQeYqVesxEfAfir0G9ZVybGB0YmZQsyMsLBIoOrWCBQxrWpAZoqFank2e6dw32mmDX2B4L58PSDD7t1Tp-fVDRc8xRJWelGgJQYsPInboVaJinwGHpGEEE4Ka4ziRgW-toLJkPGYa82MjaVgIuaGWc4OyWr-kZsjQgOtTBIJrnzNIIQDQVBM2tBEmvtShvqY-M1Sp6pGI8emGOO0STt7S4E7KXIn9W9S4M4xuZyTTCoojmWTecO_dEGeUjAVy8haC7yePwhLfEF5RSf_u-8p2cAzlwcTnpHVcjoz5-DNlLLlxLVF1m7v-70BHvuPz_1vKZH7EQ
linkProvider Elsevier
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LT9wwEB7BIgRVhQptBS1QH3pCikhiJ2yOaFW0PLonkLhZfpYgCKtN9ifwv5lJnAgkxKHXOONEHmce8TffAPwuEu-FFkmks7GjXzc2UkInkUq9ya2wY61bgOwsn96Ii9vsdgUmfS0MwSqD7e9semutw5XjsJrH87KkGl90RnFBR29JmhYnq7AmMrTJI1g7Pb-czgaDjKMDeI4E-sPNFubV1C2RJ28pPCkMft89fZ6rGhfNd90uXrmgsy-wFWJHdtq93jasuGoHPr1iFNyB9RbRaeqv8DwZqJi7SkumKsvKKqrLZske20-ZZNiTZ_VSRxgEluaOivGJs58pe0-lVfrB4ejcLTBtJmZYEjChOwIjWqvAycyoVq0ql48M512U1rF_mN83d9_g5uzP9WQahZ4LkeEFb6IssZpyFlHk49SawmQxx6BIYxanlXfOCGeS2HrFdcpFLqzlzudacZULx73g32FUPVVuF1hijSsyJUxsOWZxuBcM1z51mRWx1qndg7hfamkCITn1xXiQPfLsXqJ2JGlHxicStbMHR4PIvGPj-Ohm0etPvtlSEr3FR2KHb3Q9PIiqfNF-ZT_-b95fsDG9_nslr85nlz9hk0ZaWEy6D6NmsXQHGNw0-jBs3hfHIPwZ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Characterization+and+in-situ+monitoring+of+sub-stoichiometric+adjustable+superconducting+critical+temperature+titanium+nitride+growth&rft.jtitle=Thin+solid+films&rft.au=VISSERS%2C+Michael+R&rft.au=JIANSONG+GAO&rft.au=KLINE%2C+Jeffrey+S&rft.au=SANDBERG%2C+Martin&rft.date=2013-12-02&rft.pub=Elsevier&rft.issn=0040-6090&rft.volume=548&rft.spage=485&rft.epage=488&rft_id=info:doi/10.1016%2Fj.tsf.2013.07.046&rft.externalDBID=n%2Fa&rft.externalDocID=28250175
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0040-6090&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0040-6090&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0040-6090&client=summon