Influence of substrate temperature on the performance of zinc oxide thin film transistor - 马军伟 冉峰 徐美华 计慧杰 (Journal of semiconductors, 2011)
Keywords: Deposition; Devices; Gates; Radio frequencies; Semiconductor devices; Semiconductors; Thin film transistors; Zinc oxide; 原子力显微镜; 场效应迁移率; 无线电频率; 晶体性能; 氧化锌薄膜; 薄膜晶体管; 薄膜沉积; 衬底温度