SEE characteristics of small feature size devices by using laser backside testing - 封国强 上官士鹏 马英起 韩建伟 (Journal of semiconductors, 2012)
Keywords: Cross sections; Devices; Empirical analysis; Lasers; Latch-up; Semiconductors; Single event upsets; Thresholds; 工艺制造; 测试方法; 激光; 特征尺寸; 经验关系; 背面; 能量阈值; 设备