High-shock silicon accelerometer with an over-range stopper
In this research, an accelerometer with an over-range stopper was designed, fabricated and evaluated. When a shock beyond the sensing range is applied to an acceleration sensor, an over-range stopper limits the amount of longitudinal deformation in the sensing bridge, which is weak to shocks, below...
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| Published in | Journal of mechanical science and technology Vol. 30; no. 4; pp. 1817 - 1824 |
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| Main Authors | , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Seoul
Korean Society of Mechanical Engineers
01.04.2016
Springer Nature B.V 대한기계학회 |
| Subjects | |
| Online Access | Get full text |
| ISSN | 1738-494X 1976-3824 |
| DOI | 10.1007/s12206-016-0338-8 |
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| Abstract | In this research, an accelerometer with an over-range stopper was designed, fabricated and evaluated. When a shock beyond the sensing range is applied to an acceleration sensor, an over-range stopper limits the amount of longitudinal deformation in the sensing bridge, which is weak to shocks, below a certain level and so prevents the acceleration sensor from breaking. To analyze the effect of the overrange stopper shape on acceleration sensor performance, we fabricated high-shock accelerometers with over-range stoppers of three different lengths (short, medium and long models). We then performed a comparative analysis of the performance of each accelerometer. |
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| AbstractList | In this research, an accelerometer with an over-range stopper was designed, fabricated and evaluated. When a shock beyond the sensing range is applied to an acceleration sensor, an over-range stopper limits the amount of longitudinal deformation in the sensing bridge, which is weak to shocks, below a certain level and so prevents the acceleration sensor from breaking. To analyze the effect of the overrange stopper shape on acceleration sensor performance, we fabricated high-shock accelerometers with over-range stoppers of three different lengths (short, medium and long models). We then performed a comparative analysis of the performance of each accelerometer. In this research, an accelerometer with an over-range stopper was designed, fabricated and evaluated. When a shock beyond the sensing range is applied to an acceleration sensor, an over-range stopper limits the amount of longitudinal deformation in the sensing bridge, which is weak to shocks, below a certain level and so prevents the acceleration sensor from breaking. To analyze the effect of the overrange stopper shape on acceleration sensor performance, we fabricated high-shock accelerometers with over-range stoppers of three different lengths (short, medium and long models). We then performed a comparative analysis of the performance of each accelerometer. KCI Citation Count: 0 |
| Author | Ko, Jong Soo Choi, Chang Jun Jang, Chang Uk Han, Jeong Sam Lee, Jae Min Kwon, Ki Beom Kwon, Nam Yeol |
| Author_xml | – sequence: 1 givenname: Jae Min surname: Lee fullname: Lee, Jae Min organization: Graduate School of Mechanical Engineering, Pusan National University – sequence: 2 givenname: Chang Uk surname: Jang fullname: Jang, Chang Uk organization: Graduate School of Mechanical Engineering, Pusan National University – sequence: 3 givenname: Chang Jun surname: Choi fullname: Choi, Chang Jun organization: Graduate School of Mechanical Engineering, Pusan National University – sequence: 4 givenname: Ki Beom surname: Kwon fullname: Kwon, Ki Beom organization: Department of Mechanical Design Engineering, Andong National University – sequence: 5 givenname: Jeong Sam surname: Han fullname: Han, Jeong Sam organization: Department of Mechanical Design Engineering, Andong National University – sequence: 6 givenname: Nam Yeol surname: Kwon fullname: Kwon, Nam Yeol organization: Technical Team 2 R&D Center, Poongsan FNS Corporation – sequence: 7 givenname: Jong Soo surname: Ko fullname: Ko, Jong Soo email: mems@pusan.ac.kr organization: Graduate School of Mechanical Engineering, Pusan National University |
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| Cites_doi | 10.1088/0960-1317/12/6/304 10.1109/JPROC.2009.2013612 10.1007/s12206-015-0805-7 10.1088/0960-1317/15/5/014 10.1109/T-ED.1979.19795 10.1109/JMEMS.2010.2076783 10.1007/s12206-014-0131-5 10.1109/5.704269 10.1007/s12206-013-0133-8 10.1109/SOLSEN.1988.26427 10.1016/0924-4247(95)00981-7 10.1088/0960-1317/17/6/015 10.1016/S0924-4247(98)00022-3 10.1016/S0924-4247(97)80060-X 10.1155/1999/281718 |
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| Keywords | Accelerometer Piezoresistive Over-range stopper High-shock |
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| SubjectTerms | Acceleration Accelerometers Breaking Control Deformation Detection Dynamical Systems Engineering Industrial and Production Engineering Mechanical Engineering Sensors Silicon Vibration 기계공학 |
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| Title | High-shock silicon accelerometer with an over-range stopper |
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