Effects of atomic layer deposition temperatures on structural and electrical properties of ZnO films and its thin film transistors - Gong, Su Cheol; Bang, Seokhwan; Jeon, Hyeongtag; Park, Hyung-Ho; Chang, Young Chul; Chang, Ho Jung (Metals and materials international, 2010)
Keywords: Atomic structure; Characterization and Evaluation of Materials; Chemistry and Materials Science; Engineering Thermodynamics; Heat and Mass Transfer; Machines; Magnetic Materials; Magnetism; Manufacturing; Materials Science; Metallic Materials; Processes; Solid Mechanics; 재료공학; ZnO semiconductors; X-ray diffraction; thin film transistors; atomic layer deposition; electrical properties; PVP (poly-4-vinylphenol) insulators