Gong, S. C., Bang, S., Jeon, H., Park, H., Chang, Y. C., & Chang, H. J. (2010). Effects of atomic layer deposition temperatures on structural and electrical properties of ZnO films and its thin film transistors. Metals and materials international, 16(6), 953-958. https://doi.org/10.1007/s12540-010-1214-1
Chicago Style (17th ed.) CitationGong, Su Cheol, Seokhwan Bang, Hyeongtag Jeon, Hyung-Ho Park, Young Chul Chang, and Ho Jung Chang. "Effects of Atomic Layer Deposition Temperatures on Structural and Electrical Properties of ZnO Films and Its Thin Film Transistors." Metals and Materials International 16, no. 6 (2010): 953-958. https://doi.org/10.1007/s12540-010-1214-1.
MLA (9th ed.) CitationGong, Su Cheol, et al. "Effects of Atomic Layer Deposition Temperatures on Structural and Electrical Properties of ZnO Films and Its Thin Film Transistors." Metals and Materials International, vol. 16, no. 6, 2010, pp. 953-958, https://doi.org/10.1007/s12540-010-1214-1.