Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering
Microbial cellulose （MC） membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide （ITO） electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency （RF） magn...
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| Published in | Chinese journal of chemical engineering Vol. 19; no. 2; pp. 179 - 184 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier B.V
01.04.2011
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1004-9541 2210-321X |
| DOI | 10.1016/S1004-9541(11)60151-1 |
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| Abstract | Microbial cellulose （MC） membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide （ITO） electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency （RF） magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and op-toelectrical characteristics with X-ray diffraction （XRD）,scanning electron microscopy （SEM）,atomic force mi-croscopy （AFM）,and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content （O2/Ar,volume ratio） in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ～120 Ω·square-1 （Ω·sq-1）] and transparent （above 76%） ITO thin films （240 nm thick） were obtained with a moderate sputtering power （about 60 W） and with an oxygen flow rate of 0.25 ml·min-1 （sccm） during the deposi-tion.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices. |
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| AbstractList | Microbial cellulose （MC） membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide （ITO） electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency （RF） magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and op-toelectrical characteristics with X-ray diffraction （XRD）,scanning electron microscopy （SEM）,atomic force mi-croscopy （AFM）,and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content （O2/Ar,volume ratio） in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ～120 Ω·square-1 （Ω·sq-1）] and transparent （above 76%） ITO thin films （240 nm thick） were obtained with a moderate sputtering power （about 60 W） and with an oxygen flow rate of 0.25 ml·min-1 （sccm） during the deposi-tion.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices. Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1, were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes. Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency (RF) magnetron sputtering. The optimum ITO deposition conditions were achieved by examining crystalline structure, surface morphology and optoelectrical characteristics with X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and UV spectroscopy. The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated. The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content (O sub(2/Ar, volume ratio) in the sputtering chamber. And the ITO crystalline structure directly determines the conductivity of ITO-deposited films. High conductive [sheet resistance [inline image]120 [Omega]) super(.)square[super]-1 ([Omega] super(.sq[super]-1)] and transparent (above 76%) ITO thin films (240 nm thick) were obtained with a moderate sputtering power (about 60 W) and with an oxygen flow rate of 0.25 ml) super(.)min[super]-1 (sccm) during the deposition. These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices. Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1, were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes. Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency (RF) magnetron sputtering. The optimum ITO deposition conditions were achieved by examining crystalline structure, surface morphology and optoelectrical characteristics with X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and UV spectroscopy. The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated. The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content (O 2/Ar, volume ratio) in the sputtering chamber. And the ITO crystalline structure directly determines the conductivity of ITO-deposited films. High conductive [sheet resistance ∼120 Ω·square −1 (Ω·sq −1)] and transparent (above 76%) ITO thin films (240 nm thick) were obtained with a moderate sputtering power (about 60 W) and with an oxygen flow rate of 0.25 ml·min −1 (sccm) during the deposition. These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices. |
| Author | 杨加志 赵成刚 刘晓丽 于俊伟 孙东平 唐卫华 |
| AuthorAffiliation | School of Chemislxy and Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China School of Mechanical Engineering, Anyang Institute of Technology, Anyang 455000, China |
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| CitedBy_id | crossref_primary_10_1016_j_materresbull_2015_01_038 crossref_primary_10_1007_s10854_011_0553_0 crossref_primary_10_3390_polym15030479 crossref_primary_10_1007_s10854_016_5881_7 crossref_primary_10_1016_j_jiec_2024_08_052 crossref_primary_10_1142_S0218625X21500943 |
| Cites_doi | 10.1016/j.jnoncrysol.2005.11.088 10.1016/j.apsusc.2005.03.093 10.1016/j.tsf.2007.10.042 10.1016/j.msec.2005.10.078 10.1016/j.tsf.2007.10.041 10.1007/s00253-004-1756-6 10.1016/S0956-5663(02)00212-9 10.1016/j.optcom.2005.08.053 10.1016/j.apsusc.2007.01.110 10.1016/j.apsusc.2007.11.063 10.1016/j.eurpolymj.2007.04.039 10.1002/adma.200400597 10.1016/S0928-4931(02)00078-4 10.1016/j.jpcs.2007.07.115 10.1016/j.tsf.2007.05.028 10.1016/j.apsusc.2007.07.080 10.1016/j.matchemphys.2007.08.015 10.1016/j.surfcoat.2005.02.040 10.1016/j.jcis.2007.03.043 10.1016/j.solmat.2008.04.019 10.1016/S0040-6090(03)00961-1 10.1016/S0079-6700(01)00021-1 |
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| Keywords | magnetron sputtering indium tin oxide optical properties microbial cellulose membrane thin films |
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| Notes | thin films; magnetron sputtering; microbial cellulose membrane; optical properties; indium tin oxide YANG Jiazhi 1,ZHAO Chenggang2,LIU Xiaoli1,YU Junwei1,SUN Dongping1,and TANG Weihua 1,1 School of Chemistry and Chemical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China 2 School of Mechanical Engineering,Anyang Institute of Technology,Anyang 455000,China Microbial cellulose （MC） membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide （ITO） electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency （RF） magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and op-toelectrical characteristics with X-ray diffraction （XRD）,scanning electron microscopy （SEM）,atomic force mi-croscopy （AFM）,and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content （O2/Ar,volume ratio） in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ～120 Ω·square-1 （Ω·sq-1）] and transparent （above 76%） ITO thin films （240 nm thick） were obtained with a moderate sputtering power （about 60 W） and with an oxygen flow rate of 0.25 ml·min-1 （sccm） during the deposi-tion.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices. 11-3270/TQ ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
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| Snippet | Microbial cellulose （MC） membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin... Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1, were used as flexible substrates for the fabrication of transparent indium tin... Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1, were used as flexible substrates for the fabrication of transparent indium tin... |
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| SubjectTerms | Crystal structure Deposition Electrical resistivity Indium tin oxide Magnetron sputtering Membranes microbial cellulose membrane Microorganisms optical properties Radio frequencies thin films 微生物 扫描电子显微镜 溅射膜 磁控溅射 纤维素 薄膜制备 薄膜沉积 铟锡氧化物 |
| Title | Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering |
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