Robustness diagrams based optimal design of run-to-run control subject to deterministic and stochastic disturbances - Hwang, Shyh-Hong; Lin, Jui-Chi; Wang, Hsin-Chun (Journal of process control, 2018)
Keywords: Autoregressive moving average noise; EWMA algorithm; Metrology delays; Robust optimal design; Robust stability; Run-to-run control; EWMA algorithm; Robust optimal design; Run-to-run control; Robust stability; Autoregressive moving average noise; Metrology delays