Design and noise analysis of a sigma-delta capacitive micromachined accelerometer
A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter.The three main noise sources affecting the overall syst...
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| Published in | Journal of semiconductors Vol. 31; no. 5; pp. 96 - 101 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
IOP Publishing
01.05.2010
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-4926 |
| DOI | 10.1088/1674-4926/31/5/055006 |
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| Abstract | A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter.The three main noise sources affecting the overall system resolution of aΣΔaccelerometer, mechanical noise,electronic noise and quantization noise,are analyzed in detail.Accurate mathematical formulas for electronic and quantization noise are established.The ASIC is fabricated in a 0.5μm two-metal two-poly n-well CMOS process.The test results indicate that the mechanical noise and electronic noise are 1μg/（Hz）~（1/2） and 8μV/（Hz）~（1/2） respectively,and the theoretical models of electronic and quantization noise agree well with the test and simulation results. |
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| AbstractList | A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter.The three main noise sources affecting the overall system resolution of aΣΔaccelerometer, mechanical noise,electronic noise and quantization noise,are analyzed in detail.Accurate mathematical formulas for electronic and quantization noise are established.The ASIC is fabricated in a 0.5μm two-metal two-poly n-well CMOS process.The test results indicate that the mechanical noise and electronic noise are 1μg/（Hz）~（1/2） and 8μV/（Hz）~（1/2） respectively,and the theoretical models of electronic and quantization noise agree well with the test and simulation results. |
| Author | 刘云涛 刘晓为 陈伟平 吴群 |
| AuthorAffiliation | MEMS Center, Harbin Institute of Technology, Harbin 150001, China College of Information and Communication Engineering, Harbin Engineering University, Harbin 150001, China |
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| Cites_doi | 10.1109/84.946800 10.1109/TCSI.2006.869901 10.1088/0960-1317/15/7/004 10.1109/TCSI.2008.916557 10.1109/JSSC.2005.863148 10.1109/TIM.2007.904477 10.1109/4.753678 10.1016/S0924-4247(98)00064-8 |
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| Notes | ASIC TP212 accelerometer TH824.4 sigma-delta 11-5781/TN noise analysis; sigma-delta; micromachined; accelerometer; ASIC micromachined noise analysis |
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| Snippet | A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators... |
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| SubjectTerms | CMOS工艺 Σ-Δ 噪声源 微机械加速度计 电子电路 电容式 设计 量化噪声 |
| Title | Design and noise analysis of a sigma-delta capacitive micromachined accelerometer |
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