Effect of Growth Rate and Wafering on Residual Stress of Diamond Wire Sawn Silicon Wafers - Kumar, Arkadeep; Prasath, R.G.R.; Pogue, Vanessa; Skenes, Kevin; Yang, Chris; Melkote, Shreyes N.; Danyluk, Steven (Procedia manufacturing, 2016)
Keywords: diamond wire sawing; multi-crystalline silicon; residual stress; residual stress; diamond wire sawing; multi-crystalline silicon