Spectral measurement with a linear variable filter using a LMS algorithm
This paper presents spectral measurements using a linear variable optical filter. A LVOF has been developed for operation in the 530 nm–720 nm spectral band and has been fabricated in an IC-compatible process. The LVOF has been mounted on a CMOS camera. A Least Mean Square algorithm has been impleme...
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| Published in | Procedia engineering Vol. 5; pp. 504 - 507 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier Ltd
2010
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1877-7058 1877-7058 |
| DOI | 10.1016/j.proeng.2010.09.157 |
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| Abstract | This paper presents spectral measurements using a linear variable optical filter. A LVOF has been developed for operation in the 530 nm–720 nm spectral band and has been fabricated in an IC-compatible process. The LVOF has been mounted on a CMOS camera. A Least Mean Square algorithm has been implemented to calculate the spectrum of light from the recorded image on the CMOS camera. A spectral resolution of 0.5 nm has been achieved using the algorithm. The spectral resolution is limited by the monochromator accuracy used for calibration. |
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| AbstractList | This paper presents spectral measurements using a linear variable optical filter. A LVOF has been developed for operation in the 530 nm–720 nm spectral band and has been fabricated in an IC-compatible process. The LVOF has been mounted on a CMOS camera. A Least Mean Square algorithm has been implemented to calculate the spectrum of light from the recorded image on the CMOS camera. A spectral resolution of 0.5 nm has been achieved using the algorithm. The spectral resolution is limited by the monochromator accuracy used for calibration. |
| Author | Wu, H. Emadi, Arvin Grabarnik, S. de Graaf, G. Wolffenbuttel, R.F. |
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| Keywords | On-chip Micro-spectrometer Least mean square Linear variable filter |
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| References | Massicotte, Morawski, Barwicz (br000025) 1997; 46 Wolffenbuttel (br000005) 2005; 15 A. Emadi, H. Wu, S. Grabarnik, G. De Graaf, R.F. Wolffenbuttel, IC-compatible fabrication of linear variable optical filters for microspectrometer, Procedia Chemistry, Volume 1, Issue 1, Proceedings of the Eurosensors XXIII conference, September 2009, Pages 1143–1146. Grabarnik, Emadi, Wu, de Graaf, Wolffenbuttel (br000030) 2008; 47 Emadi, Wu, Grabarnik, de Graaf, Wolffenbuttel (br000020) 2009; 19 Correia, de Graaf, Kong, Bartek, Wolffenbuttel (br000010) 2000; 82 Emadi (10.1016/j.proeng.2010.09.157_br000020) 2009; 19 Wolffenbuttel (10.1016/j.proeng.2010.09.157_br000005) 2005; 15 Correia (10.1016/j.proeng.2010.09.157_br000010) 2000; 82 10.1016/j.proeng.2010.09.157_br000015 Massicotte (10.1016/j.proeng.2010.09.157_br000025) 1997; 46 Grabarnik (10.1016/j.proeng.2010.09.157_br000030) 2008; 47 |
| References_xml | – reference: A. Emadi, H. Wu, S. Grabarnik, G. De Graaf, R.F. Wolffenbuttel, IC-compatible fabrication of linear variable optical filters for microspectrometer, Procedia Chemistry, Volume 1, Issue 1, Proceedings of the Eurosensors XXIII conference, September 2009, Pages 1143–1146. – volume: 46 year: 1997 ident: br000025 article-title: Kalman-filter-based algorithms of spectrometric data correction-Part I: An iterative algorithm of deconvolution publication-title: IEEE Transactions on Instrumentation and Measurement – volume: 47 start-page: 6442 year: 2008 end-page: 6447 ident: br000030 article-title: High-resolution microspectrometer with an aberration-correcting planar grating publication-title: Appl. Opt. – volume: 15 start-page: S145 year: 2005 end-page: S152 ident: br000005 article-title: MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range publication-title: J. Micromech. Microeng. – volume: 19 start-page: 074014 year: 2009 ident: br000020 article-title: Vertically tapered lay ers for optical applications fabricated using resist reflow publication-title: J. Micromech. Microeng. – volume: 82 start-page: 191 year: 2000 end-page: 197 ident: br000010 article-title: Single-chip CMOS optical micro-interferometer publication-title: Sens. Actuators A, Phys. – volume: 82 start-page: 191 year: 2000 ident: 10.1016/j.proeng.2010.09.157_br000010 article-title: Single-chip CMOS optical micro-interferometer publication-title: Sens. Actuators A, Phys. doi: 10.1016/S0924-4247(99)00369-6 – volume: 47 start-page: 6442 year: 2008 ident: 10.1016/j.proeng.2010.09.157_br000030 article-title: High-resolution microspectrometer with an aberration-correcting planar grating publication-title: Appl. Opt. doi: 10.1364/AO.47.006442 – ident: 10.1016/j.proeng.2010.09.157_br000015 doi: 10.1016/j.proche.2009.07.285 – volume: 19 start-page: 074014 year: 2009 ident: 10.1016/j.proeng.2010.09.157_br000020 article-title: Vertically tapered lay ers for optical applications fabricated using resist reflow publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/7/074014 – volume: 46 issue: 3 year: 1997 ident: 10.1016/j.proeng.2010.09.157_br000025 article-title: Kalman-filter-based algorithms of spectrometric data correction-Part I: An iterative algorithm of deconvolution publication-title: IEEE Transactions on Instrumentation and Measurement doi: 10.1109/19.585429 – volume: 15 start-page: S145 year: 2005 ident: 10.1016/j.proeng.2010.09.157_br000005 article-title: MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/15/7/021 |
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| SubjectTerms | Least mean square Linear variable filter Micro-spectrometer On-chip |
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| Title | Spectral measurement with a linear variable filter using a LMS algorithm |
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