LASIE: Large Area Spectroscopic Imaging Ellipsometry for Characterizing Multi-Layered Film Structures - Kim, Dae Hee; Yun, Young Ho; Joo, Ki-Nam (International journal of precision engineering and manufacturing, 2018)
Keywords: Broadband; Engineering; Field of view; Film thickness; Image resolution; Industrial and Production Engineering; Materials Science; Multilayers; Regular Paper; Spectroellipsometry; Spectroscopic ellipsometry; Film thickness measurement; 3D profile measurement; Multi-layered film structure; Large area measurements