Radiofrequency characteristics of ionized sputtered tantalum nitride thin-film resistor in CMOS device - Sul, Woo Suk; Kwon, Soon Hyeong; Choi, Eunmi; Cui, Yinhua; Lee, Kang Won; Shim, Ho Jae; Gao, Yuan; Hahn, Sang June; Pyo, Sung Gyu (Electronic materials letters, 2017)
Keywords: Characterization and Evaluation of Materials; Chemistry and Materials Science; CMOS; Condensed Matter Physics; Materials Science; Nanotechnology; Nanotechnology and Microengineering; Optical and Electronic Materials; Radio frequency; Silicon substrates; Tantalum; Tantalum nitrides; Thin films; 전자/정보통신공학; RFIC; CMOS; patterned ground shield; tantalum nitride thin film; resistance; thin-film resistor