Simulation and analysis of Si deposition in turbulent CVD reactors - 魏家星 徐睿 禹燕飞 侯金亮 李昌烽 (Journal of semiconductors, 2014)
Keywords: Computational fluid dynamics; Computer simulation; CVD; Deposition; Mathematical models; Reactors; Semiconductors; Silicon; Turbulence; 卧式反应器; 反应模式; 数值模拟; 时间平均; 沉积速率; 路径损耗