Through-thickness texture gradient of tantalum sputtering target - Deng, Chao; Liu, Shi-Feng; Hao, Xiao-Bo; Ji, Jing-Li; Liu, Qing; Fan, Hai-Yang (Rare metals, 2017)
Keywords: Annealing; Biomaterials; Chemistry and Materials Science; Energy; Materials Engineering; Materials Science; Metallic Materials; Nanoscale Science and Technology; Physical Chemistry; Shear; Sputtering; Surface layers; Tantalum; Texture; 厚度; 梯度; 溅射靶材; 相关成分; 织构; 表面层; 轧制过程; 钽; Electron backscatter diffraction; Texture; Tantalum sputtering target; Recrystallization