Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

• Published in: Plasma science & technology Vol. 19; no. 7; pp. 110 - 117
• Main Author: 张玲 陈果 何智兵 艾星 黄景林 刘磊 唐永建 何小珊
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.07.2017
• Subjects: glow discharge polymer films; plasma diagnosis; surface morphology; surface roughness; working pressure; 傅里叶变换红外光谱; 场发射扫描电子显微镜; 控制技术; 等离子体特性; 聚合物膜; 表面粗糙度; 诊断; 辉光放电
• ISSN: 1009-0630; 1009-0630
• DOI: 10.1088/2058-6272/aa6618

The effects of working pressure on the component, surface morphology, surface roughness, and deposition rate of glow discharge polymer （GDP） films by a trans-2-butene/hydrogen gas mixture were investigated based on plasma characteristics diagnosis. The composition and ion energy distributions of a multi-carbon （CaHs/H2） plasma mixture at different working pressures were diagnosed by an energy-resolved mass spectrometer （MS） during the GDP film deposition process. The Fourier transform infrared spectroscopy （FT-IR）, field emission scanning electron microscope （SEM） and white-fight interferometer （WLI） results were obtained to investigate the structure, morphology and roughness characterization of the deposited films, respectively. It was found that the degree of ionization of the C4H8/H2 plasma reduces with an increase in the working pressure. At a low working pressure, the C-H fragments exhibited small-mass and high ion energy in plasma. In this case, the film had a low CH3/CH2 ratio, and displayed a smooth surface without any holes, cracks or asperities. While the working pressure increased to 15 Pa, the largest number of large-mass fragments led to the deposition rate reaching a maximum of 2.11 #m h-1, and to hole defects on the film surface. However, continuing to increase the working pressure, the film surface became smooth again, and the interface between clusters became inconspicuous without etching pits.