Feedforward Control Algorithms for MEMS Galvos and Scanners - Barrett, Lawrence K.; Imboden, Matthias; Javor, Joshua; Campbell, David K.; Bishop, David J. (Journal of microelectromechanical systems, 2021)
Keywords: Algorithms; Amplitudes; Control algorithms; Control theory; Damping; Excitation; Feedforward control; Force; Galvanometers; galvos; Mathematical model; MEMS; Micromechanical devices; Microscopes; open loop controls; Open loop systems; Optical pulses; Optical scanners; Q devices; Resonant frequencies; Resonant frequency; Scanners; Software packages; step and settle time