Corrosion and Protection of Silicon Nitride Insulators in Microelectrode Array Applications - Karttu, Antti; Lahtonen, Kimmo; Heikkila, Juha; Valiaho, Jari; Narkilahti, Susanna; Lekkala, Jukka; Kallio, Pasi (IEEE sensors journal, 2022)
Keywords: Atomic layer deposition; Atomic layer epitaxy; Biocompatibility; biosensor; Capacitance; Cell culture; Chemical vapor deposition; Corrosion; Corrosion rate; Corrosive wear; cytocompatibility; Electric contacts; Electrical insulation; Electrochemical impedance spectroscopy; Impedance; Insulation; Insulators; Integrity; MEA; Media; microelectrode array; Microelectrodes; Profilometers; Reliability; Sensor arrays; Silicon nitride; Stem cells; Thickness; Titanium; Titanium dioxide