APA (7th ed.) Citation

Lin, H., Basu, N., Chen, S., Lee, M., & Liao, M. (2022). The demonstration of low-temperature (350 °C) grown carbon nano-tubes for the applications of through silicon via in 3D stacking and power-via. Applied physics letters, 121(23), . https://doi.org/10.1063/5.0127386

Chicago Style (17th ed.) Citation

Lin, H.-Y, Nilabh Basu, S.-C Chen, M.-H Lee, and M.-H Liao. "The Demonstration of Low-temperature (350 °C) Grown Carbon Nano-tubes for the Applications of Through Silicon via in 3D Stacking and Power-via." Applied Physics Letters 121, no. 23 (2022). https://doi.org/10.1063/5.0127386.

MLA (9th ed.) Citation

Lin, H.-Y, et al. "The Demonstration of Low-temperature (350 °C) Grown Carbon Nano-tubes for the Applications of Through Silicon via in 3D Stacking and Power-via." Applied Physics Letters, vol. 121, no. 23, 2022, https://doi.org/10.1063/5.0127386.