Effects of mathematical models and algorithms on quantitative characterization of areal step height with optical and stylus profilometers - Wang, Chen; Yu, Yingjie; Zhang, Xiangchao; D'Amato, Roberto; Gomez, Emilio (Precision engineering, 2021)
Keywords: Areal surface topography; Optical measurement; Step height characterization; Stylus profilometers; Surface metrology; Optical measurement; Step height characterization; Areal surface topography; Stylus profilometers; Surface metrology