Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications - 解婧 刘云飞 杨晋玲 唐龙娟 杨富华 (Journal of semiconductors, 2009)
Keywords: MEMS谐振器; 低压化学气相淀积; 原位掺杂; 多晶硅薄膜; 应力和; 应用; 薄膜电阻; 高Q值