Experimental Investigation of AWJ Slicing of Single Crystal Silicon Using Fuzzy Grey Relational Analysis (FGRA) - Sundararaj, Oliver Nesa Raj; Sethuramalingam, Prabhu (SILICON, 2022)
Keywords: Abrasive machining; Algorithms; Chemistry; Chemistry and Materials Science; Content analysis; Crystallization; Electron microscopes; Environmental Chemistry; Flow velocity; Fuzzy logic; Garnets; Grain size; Hydraulic jets; Inclination angle; Inorganic Chemistry; Lasers; Material removal rate (machining); Materials Science; Optical Devices; Optical properties; Optics; Optimization; Original Paper; Orthogonal arrays; Parameter identification; Photonics; Polymer Sciences; Raman spectroscopy; Silicon; Single crystals; Surface roughness; Variance analysis; Water pressure; Grey–fuzzy reasoning grade (GFRG); UV-VIS spectrophotometer; Atomic force microscope (AFM); Abrasive Water Jet Machining; Carbon Nano Tubes (CNT)