Development of a massively parallel electron beam write (MPEBW) system: aiming for the digital fabrication of integrated circuits - Esashi, Masayoshi; Miyaguchi, Hiroshi; Kojima, Akira; Ikegami, Naokatsu; Koshida, Nobuyoshi; Ohyi, Hideyuki (Japanese Journal of Applied Physics, 2022)
Keywords: Active control; Arrays; Driver circuits; electron beam; Electron beams; electron emitter array; Electron optics; Electrons; Emitters; Emitters (electron); Integrated circuits; LSI for active matrix control; maskless lithography; Prototyping; Silicon