An integrated MEMS piezoresistive tri-axis accelerometer - 张永平 何常德 于佳琪 杜春晖 张娟婷 丑修建 张文栋 (Journal of semiconductors, 2013)
Keywords: Accelerometers; Devices; MEMS; Navigation; Nonlinearity; Orientation; Performance indices; Piezoresistors; Semiconductors; 三轴; 加速度计; 压阻效应; 惠斯通电桥; 矢量检测; 耦合因子; 高度集成