Fabrication of high aspect ratio gratings for X-ray imaging
Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies w...
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| Published in | Optoelectronics letters Vol. 10; no. 2; pp. 88 - 90 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
Heidelberg
Tianjin University of Technology
01.03.2014
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1673-1905 1993-5013 |
| DOI | 10.1007/s11801-014-3220-x |
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| Abstract | Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating. |
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| AbstractList | Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating. |
| Author | 侯双月 熊瑛 陈珊 熊鹏辉 陈翔宇 张晓波 田扬超 刘刚 |
| AuthorAffiliation | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China,Hefei 230026, China |
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| Cites_doi | 10.1103/PhysRevLett.98.108105 10.1002/pssa.200675659 10.1038/nm0496-473 10.1016/j.mee.2007.01.151 10.1088/0022-3727/28/11/012 10.1088/0960-1317/14/7/031 10.1088/0960-1317/6/4/005 10.1143/JJAP.44.6355 10.1063/1.1146073 10.1118/1.597472 10.1038/nphys265 10.1063/1.1516611 10.1103/PhysRevA.79.013815 10.1023/A:1019133222401 |
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| Copyright | Tianjin University of Technology and Springer-Verlag Berlin Heidelberg 2014 |
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| Issue | 2 |
| Keywords | Exposure Dose Post Exposure Bake Duty Cycle Physica Status Solidus Standard Lithography |
| Language | English |
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| Notes | 12-1370/TN HOU Shuang-yue, XIONG Ying, CHEN Shan, XIONG Peng-hui, CHEN Xiang-yu , ZHANG Xiao-bo, TIAN Yang-chao,LlU Gang（1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China 2. Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China） Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating. |
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| PublicationTitle | Optoelectronics letters |
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| References | MomoseAFukudaJMedical Physics1995223751995MedPh..22..375M10.1118/1.597472 TasNSonnenbergTJansenHLegtenbergRElwenspoekMJournal of Micromechanics and Microengineering199663851996JMiMi...6..385T10.1088/0960-1317/6/4/005 MastrangeloCTribology Letters1997322310.1023/A:1019133222401 MomoseATakedaTItaiYHiranoKNature Medicine1996247310.1038/nm0496-473 MomoseAJapanese Journal of Applied Physics20054463552005JaJAP..44.6355M10.1143/JJAP.44.6355 HuangZ-FKangK-JZhangLChenZ-QDingFWangZ-TPhysical Review A2009790138152009PhRvA..79a3815H10.1103/PhysRevA.79.013815 DavidCNohammerBSolakH HZieglerEApplied Physics Letters20028132872002ApPhL..81.3287D10.1063/1.1516611 IngalVBeliaevskayaEJournal of Physics D: Applied Physics19952823141995JPhD...28.2314I10.1088/0022-3727/28/11/012 DavidCBruderJRohbeckTGrünzweigCKottlerCDiazAMicroelectronic Engineering200784117210.1016/j.mee.2007.01.151 RaccurtOTardifFD’avitayaF AVareineTJournal of Micromechanics and Microengineering20041410832004JMiMi..14.1083R10.1088/0960-1317/14/7/031 ZhuPZhangKWangZLiuYLiuXWuZLow-dose, Simple, and Fast Grating-based X-ray Phase-contrast Imaging, Proceedings of the National Academy of Sciences2010107135762010PNAS..10713576Z PfeifferFKottlerCBunkODavidCPhysical Review Letters2007981081052007PhRvL..98j8105P10.1103/PhysRevLett.98.108105 KottlerCPfeifferFBunkOGrünzweigCBruderJKaufmannRPhysica Status Solidi (a)200720427282007PSSAR.204.2728K10.1002/pssa.200675659 SnigirevASnigirevaIKohnVKuznetsovSSchelokovIReview of Scientific Instruments19956654861995RScI...66.5486S10.1063/1.1146073 PfeifferFWeitkampTBunkODavidCNature Physics200622582006NatPh...2..258P10.1038/nphys265 KenntnerJGrundTMatthisBBoernerMMohrJSchererTFront-and Backside Structuring of Gratings for Phase Contrast Imaging with X-ray Tubes, SPIE Optical Engineering Applications: International Society for Optics and Photonics2010780408 A Momose (3220_CR1) 2005; 44 J Kenntner (3220_CR12) 2010 A Momose (3220_CR2) 1995; 22 A Momose (3220_CR5) 1996; 2 Z-F Huang (3220_CR11) 2009; 79 O Raccurt (3220_CR16) 2004; 14 C David (3220_CR3) 2002; 81 V Ingal (3220_CR4) 1995; 28 A Snigirev (3220_CR7) 1995; 66 F Pfeiffer (3220_CR10) 2006; 2 N Tas (3220_CR14) 1996; 6 C Kottler (3220_CR8) 2007; 204 P Zhu (3220_CR9) 2010; 107 F Pfeiffer (3220_CR6) 2007; 98 C David (3220_CR13) 2007; 84 C Mastrangelo (3220_CR15) 1997; 3 |
| References_xml | – reference: DavidCBruderJRohbeckTGrünzweigCKottlerCDiazAMicroelectronic Engineering200784117210.1016/j.mee.2007.01.151 – reference: MomoseAFukudaJMedical Physics1995223751995MedPh..22..375M10.1118/1.597472 – reference: TasNSonnenbergTJansenHLegtenbergRElwenspoekMJournal of Micromechanics and Microengineering199663851996JMiMi...6..385T10.1088/0960-1317/6/4/005 – reference: RaccurtOTardifFD’avitayaF AVareineTJournal of Micromechanics and Microengineering20041410832004JMiMi..14.1083R10.1088/0960-1317/14/7/031 – reference: MomoseATakedaTItaiYHiranoKNature Medicine1996247310.1038/nm0496-473 – reference: ZhuPZhangKWangZLiuYLiuXWuZLow-dose, Simple, and Fast Grating-based X-ray Phase-contrast Imaging, Proceedings of the National Academy of Sciences2010107135762010PNAS..10713576Z – reference: MomoseAJapanese Journal of Applied Physics20054463552005JaJAP..44.6355M10.1143/JJAP.44.6355 – reference: MastrangeloCTribology Letters1997322310.1023/A:1019133222401 – reference: KenntnerJGrundTMatthisBBoernerMMohrJSchererTFront-and Backside Structuring of Gratings for Phase Contrast Imaging with X-ray Tubes, SPIE Optical Engineering Applications: International Society for Optics and Photonics2010780408 – reference: SnigirevASnigirevaIKohnVKuznetsovSSchelokovIReview of Scientific Instruments19956654861995RScI...66.5486S10.1063/1.1146073 – reference: PfeifferFKottlerCBunkODavidCPhysical Review Letters2007981081052007PhRvL..98j8105P10.1103/PhysRevLett.98.108105 – reference: KottlerCPfeifferFBunkOGrünzweigCBruderJKaufmannRPhysica Status Solidi (a)200720427282007PSSAR.204.2728K10.1002/pssa.200675659 – reference: PfeifferFWeitkampTBunkODavidCNature Physics200622582006NatPh...2..258P10.1038/nphys265 – reference: DavidCNohammerBSolakH HZieglerEApplied Physics Letters20028132872002ApPhL..81.3287D10.1063/1.1516611 – reference: IngalVBeliaevskayaEJournal of Physics D: Applied Physics19952823141995JPhD...28.2314I10.1088/0022-3727/28/11/012 – reference: HuangZ-FKangK-JZhangLChenZ-QDingFWangZ-TPhysical Review A2009790138152009PhRvA..79a3815H10.1103/PhysRevA.79.013815 – volume: 98 start-page: 108105 year: 2007 ident: 3220_CR6 publication-title: Physical Review Letters doi: 10.1103/PhysRevLett.98.108105 – volume: 204 start-page: 2728 year: 2007 ident: 3220_CR8 publication-title: Physica Status Solidi (a) doi: 10.1002/pssa.200675659 – volume: 2 start-page: 473 year: 1996 ident: 3220_CR5 publication-title: Nature Medicine doi: 10.1038/nm0496-473 – volume: 107 start-page: 13576 year: 2010 ident: 3220_CR9 publication-title: Low-dose, Simple, and Fast Grating-based X-ray Phase-contrast Imaging, Proceedings of the National Academy of Sciences – volume: 84 start-page: 1172 year: 2007 ident: 3220_CR13 publication-title: Microelectronic Engineering doi: 10.1016/j.mee.2007.01.151 – volume: 28 start-page: 2314 year: 1995 ident: 3220_CR4 publication-title: Journal of Physics D: Applied Physics doi: 10.1088/0022-3727/28/11/012 – volume: 14 start-page: 1083 year: 2004 ident: 3220_CR16 publication-title: Journal of Micromechanics and Microengineering doi: 10.1088/0960-1317/14/7/031 – volume: 6 start-page: 385 year: 1996 ident: 3220_CR14 publication-title: Journal of Micromechanics and Microengineering doi: 10.1088/0960-1317/6/4/005 – volume: 44 start-page: 6355 year: 2005 ident: 3220_CR1 publication-title: Japanese Journal of Applied Physics doi: 10.1143/JJAP.44.6355 – volume: 66 start-page: 5486 year: 1995 ident: 3220_CR7 publication-title: Review of Scientific Instruments doi: 10.1063/1.1146073 – start-page: 780408 volume-title: Front-and Backside Structuring of Gratings for Phase Contrast Imaging with X-ray Tubes, SPIE Optical Engineering Applications: International Society for Optics and Photonics year: 2010 ident: 3220_CR12 – volume: 22 start-page: 375 year: 1995 ident: 3220_CR2 publication-title: Medical Physics doi: 10.1118/1.597472 – volume: 2 start-page: 258 year: 2006 ident: 3220_CR10 publication-title: Nature Physics doi: 10.1038/nphys265 – volume: 81 start-page: 3287 year: 2002 ident: 3220_CR3 publication-title: Applied Physics Letters doi: 10.1063/1.1516611 – volume: 79 start-page: 013815 year: 2009 ident: 3220_CR11 publication-title: Physical Review A doi: 10.1103/PhysRevA.79.013815 – volume: 3 start-page: 223 year: 1997 ident: 3220_CR15 publication-title: Tribology Letters doi: 10.1023/A:1019133222401 |
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| SubjectTerms | Lasers Optical Devices Optics Photonics Physics Physics and Astronomy SU-8 X射线成像系统 光栅 内部结构 制造 曝光剂量 照射剂量 纵横比 |
| Title | Fabrication of high aspect ratio gratings for X-ray imaging |
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