Effect of Pt diffusion barrier layer in Ni/AuGe/Pt/Au on ohmic contact to n-GaAs - 王勇 刘丹丹 冯国庆 叶镇 高占琦 王晓华 (Journal of semiconductors, 2015)
Keywords: Contact resistance; Diffusion barriers; Gold; Morphology; Multilayers; Nickel; Platinum; Semiconductors; 多层金属; 扩散阻挡层; 欧姆接触电阻; 表面形态; 金属带; 铂