Optimized design and fabrication of nanosecond response electro-optic switch based on ultraviolet-curable polymers
A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film...
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| Published in | Chinese physics B Vol. 24; no. 4; pp. 184 - 192 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.04.2015
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-1056 2058-3834 1741-4199 |
| DOI | 10.1088/1674-1056/24/4/044101 |
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| Abstract | A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch. |
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| AbstractList | A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch. A nanosecond response waveguide electro-optic (EO) switch based on ultraviolet (UV) sensitive polymers of Norland optical adhesive (NOA73) and Dispersed Red 1 (DR1) doped SU-8 (DR1/SU-8) is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib waveguide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch. |
| Author | 赵旭亮 岳远斌 刘通 孙健 王希斌 孙小强 陈长鸣 张大明 |
| AuthorAffiliation | College of Electronic Science and Engineering, Jilin University, Changchun 130012, China State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012, China Jilin Provincial Engineering Laboratory on Polymer Planar Lightwave Circuit, Changchun 130012, China |
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| CitedBy_id | crossref_primary_10_1109_JQE_2018_2870579 crossref_primary_10_1515_amm_2015_0344 crossref_primary_10_1109_JPHOT_2019_2918314 crossref_primary_10_1117_1_OE_56_10_107105 crossref_primary_10_1016_j_optlastec_2021_107815 crossref_primary_10_1364_OSAC_2_003299 crossref_primary_10_1109_JPHOT_2020_3011749 |
| Cites_doi | 10.1109/JQE.2011.2145412 10.1117/1.3129846 10.1016/j.optlastec.2004.01.019 10.1364/OPEX.13.000564 10.1109/JPHOT.2012.2228477 10.1016/j.tsf.2012.05.016 10.1109/50.721072 10.1109/68.185058 10.7498/aps.62.194210 10.1038/nphoton.2007.25 10.1109/JSTQE.2006.880611 10.1002/1521-4095(20021002)14:191339::AID-ADMA1339>3.0.CO;2-O 10.7498/aps.60.104223 10.7498/aps.62.194204 10.3390/polym3031325 10.1063/1.3141452 10.1023/B:OQEL.0000039618.93165.64 10.1109/LPT.2005.859130 10.7498/aps.63.077801 10.7498/aps.57.5893 10.1021/jp711914a 10.1109/JLT.2005.843839 10.1117/12.909795 10.1088/1674-1056/18/9/047 10.1364/JOSAB.24.002888 10.1007/s13233-014-2101-2 10.1021/cr9000429 10.1109/JSTQE.2006.887156 10.1063/1.125742 10.1049/el:19960051 10.1016/j.tsf.2009.07.001 10.1109/JLT.2009.2022285 10.1016/j.optmat.2009.02.002 10.1007/s00542-009-1010-3 10.7498/aps.63.094207 10.1016/j.optlastec.2008.07.008 10.1109/JSTQE.2013.2268386 10.7498/aps.57.6400 10.1016/j.optcom.2009.01.032 10.1109/3.83406 |
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| Notes | 11-5639/O4 electro-optic switch, optical transmission loss, inverted-rib waveguide, poled polymers A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch. ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
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| References | 44 46 47 48 Li Y M (18) 2013; 22 49 Zhang D L (19) 2010; 19 Pan P (20) 2014; 23 Li H H (43) 2010; 19 Xu X J (26) 2009; 18 11 12 Zhang X Y (24) 2009; 11 13 14 15 16 Sun J (8) 2009; 26 1 2 3 4 5 6 7 9 21 22 23 27 28 29 Tian H (17) 2008; 57 Sun L Y (45) 2012; 61 Li Y M (40) 2013; 22 30 31 32 33 34 35 36 37 38 39 Xu H (25) 2013; 22 Chen J J (10) 2008; 57 41 42 |
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| Snippet | A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1... A nanosecond response waveguide electro-optic (EO) switch based on ultraviolet (UV) sensitive polymers of Norland optical adhesive (NOA73) and Dispersed Red 1... |
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| SubjectTerms | Electro-optics Electrodes Nanosecond response Polymers Scanning electron microscopy Switches Transmission loss Waveguides 优化设计 光电开关 制造 扫描电子显微镜 有效折射率 紫外固化 纳秒 聚合物 |
| Title | Optimized design and fabrication of nanosecond response electro-optic switch based on ultraviolet-curable polymers |
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