Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition - 孙鹏 胡明 张锋 季一勤 刘华松 刘丹丹 冷健 (Chinese physics B, 2015)
Keywords: Bonding; Carbon; Diamond-like carbon films; DLC膜; DLC薄膜; Electric potential; Infrared; Ion beams; Thin films; Voltage; 性能; 电压; 离子束溅射沉积; 类金刚石碳薄膜; 红外光学特性; 靶制备