Different variation behaviors of resistivity for high-temperature-grown and low-temperature-grown p-GaN films - 杨静 赵德刚 江德生 陈平 刘宗顺 朱建军 乐伶聪 李晓静 何晓光 张立群 杨辉 (Chinese physics B, 2016)
Keywords: Carbon; Electrical resistivity; Flow rate; GaN薄膜; Impurities; Metal organic chemical vapor deposition; p-GaN; Reactors; 低温生长; 化学气相沉积法; 电阻率; 行为; 高温