Tunable filters based on an SOI nano-wire waveguide micro ring resonator

Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring...

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Published inJournal of semiconductors Vol. 32; no. 8; pp. 65 - 69
Main Author 李帅 吴远大 尹小杰 安俊明 李建光 王红杰 胡雄伟
Format Journal Article
LanguageEnglish
Published 01.08.2011
Subjects
Nanocomposites
Nanomaterials
Nanostructure
Resonators
Semiconductors
SOI
Tunable filters
Tuning
Waveguides
可调谐滤波器
多通道滤波器
微环
条形波导
电感耦合等离子体
纳米线
谐振器
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ISSN1674-4926
DOI10.1088/1674-4926/32/8/084007

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Summary:Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range（FSR） is 16.8 nm and the extinction ratio（ER） around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter＇s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions： during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports.
Bibliography:Li Shuai,Wu Yuanda Yin Xiaojie An Junming Li Jianguang Wang Hongjie and Hu Xiongwei Optoelectronics Research and Development Center,Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083,China
SOI; micro ring resonator; thermo-optic effect; filters; crosstalk
Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range（FSR） is 16.8 nm and the extinction ratio（ER） around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter＇s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions： during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports.
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ISSN:1674-4926
DOI:10.1088/1674-4926/32/8/084007