Tunable filters based on an SOI nano-wire waveguide micro ring resonator
Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring...
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| Published in | Journal of semiconductors Vol. 32; no. 8; pp. 65 - 69 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.08.2011
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-4926 |
| DOI | 10.1088/1674-4926/32/8/084007 |
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| Abstract | Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range（FSR） is 16.8 nm and the extinction ratio（ER） around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter＇s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions： during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports. |
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| AbstractList | Micro ring resonator (MRR) filters based on a silicon on insulator (SOI) nanowire waveguide are fabricated by electron beam photolithography (EBL) and inductive coupled plasma (ICP) etching technology. The cross-section size of the strip waveguides is 450 x 220 nm super(2), and the bending radius of the micro ring is around 5 mu m. The test results from the tunable filter based on a single ring show that the free spectral range (FSR) is 16.8 nm and the extinction ratio (ER) around the wavelength 1550 nm is 18.1 dB. After thermal tuning, the filter's tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/ degree C Meanwhile, we fabricated and studied multi-channel filters based on a single ring and a double ring. After measurement, we drew the following conclusions: during the signal transmission of multi-channel filters, crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports. Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range（FSR） is 16.8 nm and the extinction ratio（ER） around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter＇s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions： during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports. |
| Author | 李帅 吴远大 尹小杰 安俊明 李建光 王红杰 胡雄伟 |
| AuthorAffiliation | Optoelectronics Research and Development Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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| CitedBy_id | crossref_primary_10_1364_OE_22_019156 crossref_primary_10_1088_1674_4926_34_7_074012 crossref_primary_10_1016_j_optcom_2016_01_018 crossref_primary_10_1016_j_optcom_2015_06_028 crossref_primary_10_1088_1674_4926_34_8_085006 |
| Cites_doi | 10.1109/JLT.2009.2026590 10.1364/OE.17.010457 10.1364/OE.18.005151 10.1364/OE.15.009625 10.1109/JLT.2007.911098 10.1016/j.optcom.2006.02.055 10.1016/j.optcom.2009.06.009 10.1364/OE.18.018235 10.3788/AOS20103002.0537 10.1109/JPHOT.2010.2090038 10.1109/JSTQE.2006.883151 10.1364/AO.48.000F24 10.1109/JLT.2004.827666 10.3788/AOS20103004.0965 10.1109/LPT.2008.927880 10.1038/nature03273 10.1109/JLT.2008.927776 10.1063/1.123337 10.1364/OE.16.009372 10.2528/PIERL08111903 10.1016/j.optcom.2010.10.057 |
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| DocumentTitleAlternate | Tunable filters based on an SOI nano-wire waveguide micro ring resonator |
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| Notes | Li Shuai,Wu Yuanda Yin Xiaojie An Junming Li Jianguang Wang Hongjie and Hu Xiongwei Optoelectronics Research and Development Center,Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083,China SOI; micro ring resonator; thermo-optic effect; filters; crosstalk Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range（FSR） is 16.8 nm and the extinction ratio（ER） around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter＇s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions： during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports. 11-5781/TN ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
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| References | 11 Dong P (19) 2010; 18 Xia F N (7) 2007; 16 12 23 13 14 15 16 17 18 1 Liu F (22) 2010; 2 2 4 5 6 8 9 Hong Jianxun (3) 2010; 30 20 10 21 |
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| Snippet | Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and... Micro ring resonator (MRR) filters based on a silicon on insulator (SOI) nanowire waveguide are fabricated by electron beam photolithography (EBL) and... |
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| SubjectTerms | Nanocomposites Nanomaterials Nanostructure Resonators Semiconductors SOI Tunable filters Tuning Waveguides 可调谐滤波器 多通道滤波器 微环 条形波导 电感耦合等离子体 纳米线 谐振器 |
| Title | Tunable filters based on an SOI nano-wire waveguide micro ring resonator |
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