Effect of active layer deposition temperature on the performance of sputtered amorphous In-Ga-Zn-O thin film transistors - 吴杰 施俊斐 董承远 邹忠飞 陈宇霆 周大祥 胡哲 詹润泽 (Journal of semiconductors, 2014)
Keywords: Deposition; Devices; Hall effect; Semiconductor devices; Semiconductors; TFT器件; Thin film transistors; Thin films; X-ray photoelectron spectroscopy; 场效应迁移率; 有源层; 沉积温度; 溅射; 电性能; 薄膜晶体管; 非晶