Improvement in a-plane GaN crystalline quality using wet etching method - 曹荣涛 许晟瑞 张进成 赵一 薛军帅 哈微 张帅 崔培水 温慧娟 陈兴 (Chinese physics B, 2014)
Keywords: Compressive properties; Crystal structure; Dislocation density; Etching; Etching (metallography); Frequency ranges; Gallium nitrides; GaN薄膜; Stresses; X-射线衍射分析; 位错密度; 汽相外延; 湿法蚀刻; 结晶质量; 薄膜生长; 金属有机