(2012, June 10). Novel technique for characterizing feature profiles in photolithography process. Chinese optics letters. https://doi.org/10.3788/col201210.061202
Chicago Style (17th ed.) Citation"Novel Technique for Characterizing Feature Profiles in Photolithography Process." Chinese Optics Letters 10 Jun. 2012. https://doi.org/10.3788/col201210.061202.
MLA (9th ed.) Citation"Novel Technique for Characterizing Feature Profiles in Photolithography Process." Chinese Optics Letters, 10 Jun. 2012, https://doi.org/10.3788/col201210.061202.
Warning: These citations may not always be 100% accurate.