Diagnostic of capacitively coupled radio frequency plasma from electrical discharge characteristics：comparison with optical emission spectroscopy and fluid model simulation - 何湘;刘冲;张亚春;陈建平;陈玉东;曾小军;陈秉岩;庞佳鑫;王一兵 (Plasma science & technology, 2018)
Keywords: COMSOL simulation; equivalent circuit model; optical emission spectrometry; plasma diagnostic; 分泌物; 收音机; 模型模拟; 血浆; 频率; 电容; 光谱学; 液体