Numerical framework for multi-scale modeling planar DC magnetron sputtering - Tran, Si Bui Quang; Leong, Fong Yew; Hariharaputran, Ramanarayan; Wenjun, Ding; Lai, Po-Yen; Le, Duc Vinh (Vacuum, 2023)
Keywords: Composition; Discharge; Planar DC magnetron sputtering; Rarefied gas; Thin film; Composition; Planar DC magnetron sputtering; Discharge; Rarefied gas; Thin film