APA (7th ed.) Citation

Tran, S. B. Q., Leong, F. Y., Hariharaputran, R., Wenjun, D., Lai, P., & Le, D. V. (2023). Numerical framework for multi-scale modeling planar DC magnetron sputtering. Vacuum, 213, 112097. https://doi.org/10.1016/j.vacuum.2023.112097

Chicago Style (17th ed.) Citation

Tran, Si Bui Quang, Fong Yew Leong, Ramanarayan Hariharaputran, Ding Wenjun, Po-Yen Lai, and Duc Vinh Le. "Numerical Framework for Multi-scale Modeling Planar DC Magnetron Sputtering." Vacuum 213 (2023): 112097. https://doi.org/10.1016/j.vacuum.2023.112097.

MLA (9th ed.) Citation

Tran, Si Bui Quang, et al. "Numerical Framework for Multi-scale Modeling Planar DC Magnetron Sputtering." Vacuum, vol. 213, 2023, p. 112097, https://doi.org/10.1016/j.vacuum.2023.112097.