Development of Gaussian Window Function for Precision Topography of Silicon-Wafer Surface Using Wavelength-Modulation Interferometry - Bae, Juncheol; Kim, Yangjin; Ito, Yusuke; Sugita, Naohiko (International journal of precision engineering and manufacturing, 2024)
Keywords: Algorithms; Diffraction patterns; Engineering; Errors; Fourier transforms; Gaussian window functions; Industrial and Production Engineering; Interferometry; Lasers; Materials Science; Measurement techniques; Modulation; Polynomials; Regression analysis; Regular Paper; Silicon; Silicon wafers; Window functions; Fizeau interferometer; Wavelength modulation; Gaussian window function; Characteristic polynomial; Silicon wafer; Surface profiling