Low Friction-Coefficient TiBCN Nanocomposite Coatings Prepared by Cathode Arc Plasma Deposition - 林宝珠 王玲玲 万强 闫少健 王泽松 杨兵 付德君 (Plasma science & technology, 2015)
Keywords: Arc deposition; Cathodes; Coatings; Deposition; Flow rate; Friction; Intermetallic compounds; Phases; Si（100）; Titanium diboride; 低摩擦系数; 扫描电子显微镜; 沉积法; 电弧等离子体; 纳米复合涂层; 阴极; 高分辨透射电子显微镜