Analysis and design of resistance-wire heater in MOCVD reactor - Qu, Yu-xuan; Wang, Bin; Hu, Shi-gang; Wu, Xiao-feng; Li, Zhi-ming; Tang, Zhi-jun; Li, Jin; Hu, Ying-lu (Journal of Central South University, 2014)
Keywords: Engineering; Metallic Materials; reactor design; metal organic chemical vapor deposition (MOCVD); filament heating; thermal analysis